Difference between revisions of "Template:Announcements"
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− | =====Dicing Saw Service Visit===== |
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− | The dicing saw will be receiving its annual PM this Thursday beginning at 8am. The FSE will also be looking into the theta rotation issue, so it is possible the work could extend into Friday. I will send out an update email sometime Thursday afternoon as to the status of the tool. |
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+ | =====Stepper #3 (ASML DUV) - Tool down===== |
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− | -Lee |
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+ | Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand. |
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− | //[[User:Mehalana v|Vraj Mehalana]] |
+ | Unfortunately, we cannot initialize the stage at this time. System is down. // [[User:Mehalana v|Vraj Mehalana]] 18:36, 3 October 2024 (PDT) |
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+ | =====MLA Service Complete===== |
+ | The FSE has completed their work. |
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− | Raith service have completed the source change, resolved the power supply and column alignment issues, and restored the Pt deposition capability to full capacity. With remote assistance from Raith I will run some calibrations and stability tests over the next few days. After that I will return the tool to general use towards the end of the week. |
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+ | I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good. |
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− | The new ion source is AuGeSi. We have no plans to return to GaBiLi for the foreseeable future. Please get in contact if you have any questions. |
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+ | Tool is available to use. |
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− | -Dan |
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− | //[[User: |
+ | -Lee // [[User:John_d|Demis D. John]] 17:46, 2 October 2024 (PDT) |
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+ | When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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+ | -Aidan |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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− | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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Latest revision as of 18:36, 3 October 2024
Stepper #3 (ASML DUV) - Tool down
Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand.
Unfortunately, we cannot initialize the stage at this time. System is down. // Vraj Mehalana 18:36, 3 October 2024 (PDT)
MLA Service Complete
The FSE has completed their work.
I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good.
Tool is available to use.
-Lee // Demis D. John 17:46, 2 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)