DUV Flood Expose: Difference between revisions
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=Detailed Specifications= |
=Detailed Specifications= |
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*DUV wavelengths are 200-260 nm; the lamp power is limited to either |
*DUV wavelengths are 200-260 nm; the lamp power is limited to either 1000 watts and can operate in either constant intensity or constant power mode |
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*The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample |
*The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample |
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*Exposure can be performed on a 4" wafer |
*Exposure can be performed on a 4" wafer |
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Revision as of 18:02, 15 June 2015
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About
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.
Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.
Detailed Specifications
- DUV wavelengths are 200-260 nm; the lamp power is limited to either 1000 watts and can operate in either constant intensity or constant power mode
- The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
- Exposure can be performed on a 4" wafer
- Lamps are nominally rated for 400 hours
- A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation
