RIE Etching Recipes: Difference between revisions

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==ZnS Etching (RIE 2)==
==ZnS Etching (RIE 2)==
*[[media:|CdZnTe Etch Recipes - CH<sub>4</sub>-H<sub>2</sub>-Ar]]
*[[media:|ZnS Etch Recipe - CH<sub>4</sub>-H<sub>2</sub>-Ar]]


==ITO Etching (RIE 2)==
==ITO Etching (RIE 2)==

Revision as of 17:06, 29 July 2016

Back to Dry Etching Recipes.

RIE 1 (Custom)

RIE 2 (MRC)

CdZnTe Etching (RIE 2)

ZnS Etching (RIE 2)

  • [[media:|ZnS Etch Recipe - CH4-H2-Ar]]

ITO Etching (RIE 2)

InP-InGaAsP-InGaAlAs Etching (RIE 2)

RIE 3 (MRC)

RIE 5 (PlasmaTherm)

AlGaAs\GaAs Etching (RIE 5)

GaN Etching (RIE 5)

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