RIE Etching Recipes: Difference between revisions
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==ZnS Etching (RIE 2)== |
==ZnS Etching (RIE 2)== |
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*[[media:|ZnS Etch Recipe - CH<sub>4</sub>-H<sub>2</sub>-Ar]] |
*[[media:ZnS_Plasma_Etch-1.pdf|ZnS Etch Recipe - CH<sub>4</sub>-H<sub>2</sub>-Ar]] |
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==ITO Etching (RIE 2)== |
==ITO Etching (RIE 2)== |
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Revision as of 17:09, 29 July 2016
Back to Dry Etching Recipes.