Template:Recipe: Difference between revisions
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==Recipe== |
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<includeonly>[[category:Recipes]]</includeonly> |
<includeonly>[[category:Recipes]]</includeonly> |
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;Recipe Name |
;Recipe Name |
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: This recipe usually doesn't work. |
: This recipe usually doesn't work. |
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: Film will etch in HF |
: Film will etch in HF |
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==Characterization== |
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[[File:Al-thickness-variation-with-rate.jpg]] |
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Revision as of 21:43, 3 August 2017
Recipe
- Recipe Name
- SiOVert_MadeUp
- Description
- This recipe is made up, and deposits glass with lots of holes in it.
- Recipe Parameters
- Ar = 20 sccm
- O2 = 10 sccm
- Pressure = 50 mT
- RF = 200 W
- Temperature = 200°C
- Dep Rate
- 200 nm/min or 12,000 nm/sec
- Notes
- Make sure sample is inside out before loading into tool.
- This recipe usually doesn't work.
- Film will etch in HF
Characterization
