Talk:Tool List: Difference between revisions

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(mention BrianT, switch Si_DeepRIE --> SLR Fluorine)
 
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[[User:Thibeault|Thibeault]] We need to change the Plasma-Therm SLR "Deep RIE" descriptions and recipes etc. We can leave the category in teh Recipes list, so old recipes can still be located, but the links on this page should point to the "PlasmaTherm SLR Fluorine etcher"
* [[User:Thibeault|Thibeault]]: We need to change the Plasma-Therm SLR "Deep RIE" descriptions and recipes etc. We can leave the category in the Recipes list, so old recipes can still be located, but the links on this page should point to the "PlasmaTherm SLR Fluorine etcher"

[[User:John d|John d]] 23:10, 22 August 2018 (PDT)
[[User:John d|John d]] 23:10, 22 August 2018 (PDT)

Latest revision as of 06:11, 23 August 2018

  • Thibeault: We need to change the Plasma-Therm SLR "Deep RIE" descriptions and recipes etc. We can leave the category in the Recipes list, so old recipes can still be located, but the links on this page should point to the "PlasmaTherm SLR Fluorine etcher"

John d 23:10, 22 August 2018 (PDT)