Rapid Thermal Processor (SSI Solaris 150): Difference between revisions
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|super = Brian Lingg |
|super = Brian Lingg |
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|picture=RTP-Solaris-150.jpg |
|picture=RTP-Solaris-150.jpg |
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|type = Thermal |
|type = Thermal Processing |
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|recipe = Thermal Processing |
|recipe = Thermal Processing |
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|toolid = 999 |
|toolid = 999 |
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Revision as of 06:06, 31 May 2019
 Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
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About
| To Do: insert basic info |
Detailed Specificiations
| To Do: list of specs, wafer sizes etc. |