Oven 4 (Thermo-Fisher HeraTherm): Difference between revisions
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m (John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven) |
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|super= Tony Bosch |
|super= Tony Bosch |
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|location=Bay 6 |
|location=Bay 6 |
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|description = |
|description = Programmable Oven |
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|manufacturer = |
|manufacturer = Thermo Scientific |
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|model = HeraTherm |
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}} |
}} |
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== About == |
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This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven. |
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== Specifications == |
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* Maximum Temperature = {{todo|find max. temp.}} (no active cooling) |
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* Gases: N2, manually set with needle valve (not programmable) |
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* Multi-step programmable temperature ramps |
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* Programmable atmospheric purge (for cooling) |
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== Documentation == |
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* {{todo|User Manual}} |
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Revision as of 23:46, 11 June 2019
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About
This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.
Specifications
- Maximum Temperature =
| To Do: find max. temp. |
(no active cooling)
- Gases: N2, manually set with needle valve (not programmable)
- Multi-step programmable temperature ramps
- Programmable atmospheric purge (for cooling)
Documentation
| To Do: User Manual |