Automated Coat/Develop System (S-Cubed Flexi): Difference between revisions

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m (edit staff use notice)
m (ToolTemplate: model & mfg. link)
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|location=Bay 7
|location=Bay 7
|description = Automatic Coat/Bake/Develop
|description = Automatic Coat/Bake/Develop
|manufacturer = S-Cubed
|manufacturer = [https://www.s-cubed.com S-Cubed]
|model = Flexi (Custom)
|ToolType = Wet Processing
|ToolType = Wet Processing
|recipe = Lithography
|recipe = Lithography

Revision as of 23:16, 8 October 2019

Automated Coat/Develop System (S-Cubed Flexi)
TBD.jpg
Tool Type Lithography
Location Bay 7
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Automatic Coat/Bake/Develop
Manufacturer S-Cubed
Model Flexi (Custom)
Lithography Recipes 


THIS TOOL IS ONLY FOR STAFF USE AT THIS TIME.

About

To Be Added

Detailed Specifications

  • Wafer Size: 100mm (150mm possible but not set up)
  • PR Coating Properties:
    • Uniformity < 1.0%
    • < 100 particles on 100mm wafer
  • Photoresists/Underlayers Available:
    • UV6-0.8
    • DS-K101-304
    • PMMA
    • PMGI SF11
    • PMGI SF5
  • Solvents Available:
    • EBR100
  • Developers Available:
    • AZ 300 MiF

Process Information

Operating Procedures

  • To Be Added
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