NanoFab Process Group: Difference between revisions
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(added Equip Cal section, and 3 Litho tools I know we have procedures for.) |
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''This page lists various processes used internally by the [https:// |
''This page lists various processes used internally by the [https://wiki.nanotech.ucsb.edu/wiki/index.php/Staff_List#Process_Group NanoFab Process Group].'' |
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== Dicing Procedures == |
== Dicing Procedures == |
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Revision as of 01:33, 7 April 2020
This page lists various processes used internally by the NanoFab Process Group.
Dicing Procedures
Photoresist Application, Cleaning and Shipping
- PR Spin for Dicing Protect - ~800nm thick PR only (UV6)
- PR Clean of UV-6
- Shipping Samples on Dicing Tape+Frame
Dicing Alignment Mark Exposure
For providing alignment marks to use while dicing.
- ASML Stepper #3: Dicing Alignment Guides
- How to program the ASML to shoot some alignment markers for use during dicing.
Process Control Calibration Procedures
Etching Tools
- Unaxis PM1: Indium Phosphide Etch Verification Procedure
- ICP#1/2: SiO2 Etch Verification Procedure
- PlasmaTherm SLR: SiO2 Etch Verification Procedure
- PlasmaTherm DSEiii: Si Etch Verification Procedure
Deposition Tools
- PECVD#1: Process Verification Procedure
- PECVD#2: Process Verification Procedure
- Unaxis PM3: Process Verification Procedure
- Veeco IBD: Process Verification Procedure