Difference between revisions of "Intellemetrics Laser Etch Monitor Procedure for Plasma-Therm Etchers"
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(basic description, point to General Procedure page.) |
(No difference)
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Latest revision as of 11:11, 8 June 2020
The Plasma-Therm software is already set up in a way such that it is very easy to perform manual transfers of wafers in/out of the chamber, and manual ending of a running recipe, so specific detailed instructions are not necessary.
Please follow the General Procedure on the previous page. Contact staff if you need a full training on the Intellemetrics laser monitor systems.