Template:Publications: Difference between revisions
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== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] == |
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''William J. Mitchell, Brian J. Thibeault, Demis D. John, and Thomas E. Reynolds'' |
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[https://doi.org/10.1116/6.0001030 Journal of Vacuum Science and Technology A, '''39''', 043204, May 27th 2021] |
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A similar process flow can be found at the [https://wiki.nanotech.ucsb.edu/wiki/index.php/ICP_Etching_Recipes#SiO2_Etching_.28Fluorine_ICP_Etcher.29 Fluorine-ICP Recipe Page]. |
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== [https://doi.org/10.1364/OL.394121 Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides] == |
== [https://doi.org/10.1364/OL.394121 Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides] == |
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Warren Jin, Demis D. John, Jared F. Bauters, Tony Bosch, Brian J. Thibeault, and John E. Bowers |
''Warren Jin, Demis D. John, Jared F. Bauters, Tony Bosch, Brian J. Thibeault, and John E. Bowers'' |
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[https://doi.org/10.1364/OL.394121 Optics Letters Vol. 45, Issue 12, pp. 3340-3343 (2020)] |
[https://doi.org/10.1364/OL.394121 Optics Letters Vol. 45, Issue 12, pp. 3340-3343 (2020)] |
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== [https://www.nature.com/articles/s41586-019-1666-5 Quantum supremacy using a programmable superconducting processor] == |
== [https://www.nature.com/articles/s41586-019-1666-5 Quantum supremacy using a programmable superconducting processor] == |
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F. Arute, K. Arya, ... Harmut Neven, John M. Martinis |
''F. Arute, K. Arya, ... Harmut Neven, John M. Martinis'' |
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[https://www.nature.com/articles/s41586-019-1666-5 Nature, volume 574, pages 505–510 (2019)] |
[https://www.nature.com/articles/s41586-019-1666-5 Nature, volume 574, pages 505–510 (2019)] |
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== [https://www.nature.com/articles/s41586-018-0065-7 An optical-frequency synthesizer using integrated photonics] == |
== [https://www.nature.com/articles/s41586-018-0065-7 An optical-frequency synthesizer using integrated photonics] == |
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D. T. Spencer, T. Drake, ... John E. Bowers, Scott A. Diddams, Scott B. Papp |
''D. T. Spencer, T. Drake, ... John E. Bowers, Scott A. Diddams, Scott B. Papp'' |
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[https://www.nature.com/articles/s41586-018-0065-7 Nature, volume 557, pages 81–85 (2018)] |
[https://www.nature.com/articles/s41586-018-0065-7 Nature, volume 557, pages 81–85 (2018)] |
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== [https://aip.scitation.org/doi/10.1063/1.5007746 Continuous-wave operation of m-plane GaN-based vertical-cavity surface-emitting lasers with a tunnel junction intracavity contact] == |
== [https://aip.scitation.org/doi/10.1063/1.5007746 Continuous-wave operation of m-plane GaN-based vertical-cavity surface-emitting lasers with a tunnel junction intracavity contact] == |
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C.A. Forman, S.G. Lee, ... S.P. DenBaars, S. Nakamura |
''C.A. Forman, S.G. Lee, ... S.P. DenBaars, S. Nakamura'' |
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[https://aip.scitation.org/doi/10.1063/1.5007746 Applied Physics Letters, Vol. 112, Issue 11, 2018] |
[https://aip.scitation.org/doi/10.1063/1.5007746 Applied Physics Letters, Vol. 112, Issue 11, 2018] |
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== [https://iopscience.iop.org/article/10.1088/1538-3873/aab5e7/meta DARKNESS: A Microwave Kinetic Inductance Detector Integral Field Spectrograph for High-contrast Astronomy] == |
== [https://iopscience.iop.org/article/10.1088/1538-3873/aab5e7/meta DARKNESS: A Microwave Kinetic Inductance Detector Integral Field Spectrograph for High-contrast Astronomy] == |
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S.R. Meeker, B.A. Mazin, ... G. Vasisht, E. Serabyn |
''S.R. Meeker, B.A. Mazin, ... G. Vasisht, E. Serabyn'' |
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[https://iopscience.iop.org/article/10.1088/1538-3873/aab5e7/meta Astronomical Society of the Pacific, Volume 130, Issue 988, pp. 065001 (2018)] |
[https://iopscience.iop.org/article/10.1088/1538-3873/aab5e7/meta Astronomical Society of the Pacific, Volume 130, Issue 988, pp. 065001 (2018)] |
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== [https://doi.org/10.1021/acs.analchem.8b00510 Dielectrophoretic Nanoparticle Aggregation for On-Demand Surface Enhanced Raman Spectroscopy Analysis] == |
== [https://doi.org/10.1021/acs.analchem.8b00510 Dielectrophoretic Nanoparticle Aggregation for On-Demand Surface Enhanced Raman Spectroscopy Analysis] == |
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R. Salemmilani, B.D. Piorek, A.W. Fountain, M. Moskovits, C.D. Meinhart |
''R. Salemmilani, B.D. Piorek, A.W. Fountain, M. Moskovits, C.D. Meinhart'' |
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[https://doi.org/10.1021/acs.analchem.8b00510 Analytical Chemistry, 90, 13, 7930-7936 (2018)] |
[https://doi.org/10.1021/acs.analchem.8b00510 Analytical Chemistry, 90, 13, 7930-7936 (2018)] |
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== [https://doi.org/10.1109/TED.2017.2770087 Demonstration of Constant 8 W/mm Power Density at 10, 30, and 94 GHz in State-of-the-Art Millimeter-Wave N-Polar GaN MISHEMTs] == |
== [https://doi.org/10.1109/TED.2017.2770087 Demonstration of Constant 8 W/mm Power Density at 10, 30, and 94 GHz in State-of-the-Art Millimeter-Wave N-Polar GaN MISHEMTs] == |
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B. Romanczyk, S. Wienecke, M. Guidry, H. Li, E. Ahmadi, X. Zheng, S. Keller, U.K. Mishra |
''B. Romanczyk, S. Wienecke, M. Guidry, H. Li, E. Ahmadi, X. Zheng, S. Keller, U.K. Mishra'' |
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[https://doi.org/10.1109/TED.2017.2770087 IEEE Transactions On Electron Devices, Vol. 65, No. 1 (2018)] |
[https://doi.org/10.1109/TED.2017.2770087 IEEE Transactions On Electron Devices, Vol. 65, No. 1 (2018)] |
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Revision as of 14:41, 27 May 2021
Publications using the Nanofab
Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask
William J. Mitchell, Brian J. Thibeault, Demis D. John, and Thomas E. Reynolds
Journal of Vacuum Science and Technology A, 39, 043204, May 27th 2021
A similar process flow can be found at the Fluorine-ICP Recipe Page.
Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides
Warren Jin, Demis D. John, Jared F. Bauters, Tony Bosch, Brian J. Thibeault, and John E. Bowers
Optics Letters Vol. 45, Issue 12, pp. 3340-3343 (2020)
Quantum supremacy using a programmable superconducting processor
F. Arute, K. Arya, ... Harmut Neven, John M. Martinis
Nature, volume 574, pages 505–510 (2019)
An optical-frequency synthesizer using integrated photonics
D. T. Spencer, T. Drake, ... John E. Bowers, Scott A. Diddams, Scott B. Papp
Nature, volume 557, pages 81–85 (2018)
Continuous-wave operation of m-plane GaN-based vertical-cavity surface-emitting lasers with a tunnel junction intracavity contact
C.A. Forman, S.G. Lee, ... S.P. DenBaars, S. Nakamura
Applied Physics Letters, Vol. 112, Issue 11, 2018
DARKNESS: A Microwave Kinetic Inductance Detector Integral Field Spectrograph for High-contrast Astronomy
S.R. Meeker, B.A. Mazin, ... G. Vasisht, E. Serabyn
Astronomical Society of the Pacific, Volume 130, Issue 988, pp. 065001 (2018)
Dielectrophoretic Nanoparticle Aggregation for On-Demand Surface Enhanced Raman Spectroscopy Analysis
R. Salemmilani, B.D. Piorek, A.W. Fountain, M. Moskovits, C.D. Meinhart
Analytical Chemistry, 90, 13, 7930-7936 (2018)
Demonstration of Constant 8 W/mm Power Density at 10, 30, and 94 GHz in State-of-the-Art Millimeter-Wave N-Polar GaN MISHEMTs
B. Romanczyk, S. Wienecke, M. Guidry, H. Li, E. Ahmadi, X. Zheng, S. Keller, U.K. Mishra
IEEE Transactions On Electron Devices, Vol. 65, No. 1 (2018)