Template:Publications: Difference between revisions
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''Publications using the Nanofab'' |
''Publications using the Nanofab'' |
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<!------------- Select Publications ----------------> |
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== [https://opg.optica.org/abstract.cfm?uri=CLEO_SI-2022-SF3O.1 250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides] == |
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''Debapam Bose, Jiawei Wang, and Daniel J. Blumenthal'' |
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[https://doi.org/10.1364/CLEO_SI.2022.SF3O.1 Conference on Lasers and Electro-Optics (CLEO), Technical Digest Series (Optica Publishing Group, 2022), paper SF3O.1] |
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== [https://doi.org/10.1109/TED.2021.3057598 0.5T0.5R—An Ultracompact RRAM Cell Uniquely Enabled by van der Waals Heterostructures] == |
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''D. Zhang, C. -H. Yeh, W. Cao and K. Banerjee'' |
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[https://doi.org/10.1109/TED.2021.3057598 IEEE Transactions on Electron Devices, '''68''' (4), 2033-2040 (2021)] |
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== [https://doi.org/10.1126/science.abh2076 Laser soliton microcombs heterogeneously integrated on silicon] == |
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''Chao Xiang, Junqiu Liu, .... Bowers, J.'' |
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[https://doi.org/10.1126/science.abh2076 Science, '''373''' (650), 99-103 (2021)] |
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== [https://doi.org/10.1103/PRXQuantum.2.010337 Ultrabright Entangled-Photon-Pair Generation from an AlGaAs-On-Insulator Microring Resonator] == |
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''Trevor J. Steiner, Joshua E. Castro, Lin Chang ... John E. Bowers, and Galan Moody'' |
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[https://doi.org/10.1103/PRXQuantum.2.010337 PRX Quantum, '''2''' 010337 (2021)] |
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== [https://doi.org/10.1038/s41467-021-24926-8 Visible light photonic integrated Brillouin laser] == |
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''Chauhan, N., Isichenko, A., Liu, K. ... Blumenthal, D.'' |
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[https://doi.org/10.1038/s41467-021-24926-8 Nature Communications, '''12''', p.4685 (2021)] |
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== [https://doi.org/10.1038/s41566-021-00831-w Optically synchronized fibre links using spectrally pure chip-scale lasers] == |
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''Brodnik, G.M., Harrington, M.W., Dallyn, J.H. .... Blumenthal, D.'' |
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[https://doi.org/10.1038/s41566-021-00831-w Nature Photonics, '''15''', 588–593 (2021)] |
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== [https://doi.org/10.35848/1882-0786/ac1230 Demonstration of high wall-plug efficiency III-nitride micro-light-emitting diodes with MOCVD-grown tunnel junction contacts using chemical treatments] == |
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''Matthew S. Wong, Matthew S. Wong ... James Speck, Shuji Nakamura, Steve DenBaars'' |
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[https://doi.org/10.35848/1882-0786/ac1230 Appl. Phys. Express A, '''14''', 086502, 2021] |
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== [https://doi.org/10.1063/5.0054005 Demonstration of high efficiency cascaded blue and green micro-light-emitting diodes with independent junction control] == |
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''Panpan Li, Hongjian Li ... James Speck, Shuji Nakamura, Steve DenBaars'' |
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[https://doi.org/10.1063/5.0054005 Appl. Phys. Lett., '''118''', 261104, 2021] |
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== [https://doi.org/10.1021/acsphotonics.0c00766 Room-Temperature Continuous-Wave Electrically Driven Semipolar (202̅1) Blue Laser Diodes Heteroepitaxially Grown on a Sapphire Substrate] == |
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''Haojun Zhang, Hongjian Li ... James Speck, Shuji Nakamura, Steve DenBaars'' |
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[https://doi.org/10.1021/acsphotonics.0c00766 ACS Photonics, '''7''' (7), 1662–1666, 2020] |
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== [https://doi.org/10.1116/6.0001030 Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask] == |
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''William J. Mitchell, Brian J. Thibeault, Demis D. John, and Thomas E. Reynolds'' |
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[https://doi.org/10.1116/6.0001030 Journal of Vacuum Science and Technology A, '''39''', 043204, May 27th 2021] |
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A similar process flow can be found at the [[ICP_Etching_Recipes#SiO2_Etching_.28Fluorine_ICP_Etcher.29|Fluorine-ICP Recipe Page]]. |
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== [https://doi.org/10.1103/PhysRevLett.126.113601 Stimulated Raman Adiabatic Passage in Optomechanics] == |
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''Vitaly Fedoseev, Fernando Luna, Ian Hedgepeth, Wolfgang Löffler, and Dirk Bouwmeester'' |
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[https://doi.org/10.1103/PhysRevLett.126.113601 Phys. Rev. Lett., '''126''', 113601, March 19th 2021] |
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== [https://doi.org/10.1364/OL.394121 Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides] == |
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''Warren Jin, Demis D. John, Jared F. Bauters, Tony Bosch, Brian J. Thibeault, and John E. Bowers'' |
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[https://doi.org/10.1364/OL.394121 Optics Letters Vol. 45, Issue 12, pp. 3340-3343 (2020)] |
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== [https://www.nature.com/articles/s41586-019-1666-5 Quantum supremacy using a programmable superconducting processor] == |
== [https://www.nature.com/articles/s41586-019-1666-5 Quantum supremacy using a programmable superconducting processor] == |
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F. Arute, K. Arya, ... Harmut Neven, John M. Martinis |
''F. Arute, K. Arya, ... Harmut Neven, John M. Martinis'' |
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[https://www.nature.com/articles/s41586-019-1666-5 Nature, volume 574, pages 505–510 (2019)] |
[https://www.nature.com/articles/s41586-019-1666-5 Nature, volume 574, pages 505–510 (2019)] |
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== An optical-frequency synthesizer using integrated photonics == |
== [https://www.nature.com/articles/s41586-018-0065-7 An optical-frequency synthesizer using integrated photonics] == |
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D. T. Spencer, T. Drake, ... John E. Bowers, Scott A. Diddams, Scott B. Papp |
''D. T. Spencer, T. Drake, ... John E. Bowers, Scott A. Diddams, Scott B. Papp'' |
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[https://www.nature.com/articles/s41586-018-0065-7 Nature, volume 557, pages 81–85 (2018)] |
[https://www.nature.com/articles/s41586-018-0065-7 Nature, volume 557, pages 81–85 (2018)] |
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== Continuous-wave operation of m-plane GaN-based vertical-cavity surface-emitting lasers with a tunnel junction intracavity contact == |
== [https://aip.scitation.org/doi/10.1063/1.5007746 Continuous-wave operation of m-plane GaN-based vertical-cavity surface-emitting lasers with a tunnel junction intracavity contact] == |
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C.A. Forman, S.G. Lee, ... S.P. DenBaars, S. Nakamura |
''C.A. Forman, S.G. Lee, ... S.P. DenBaars, S. Nakamura'' |
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[https://aip.scitation.org/doi/10.1063/1.5007746 Applied Physics Letters, Vol. 112, Issue 11, 2018] |
[https://aip.scitation.org/doi/10.1063/1.5007746 Applied Physics Letters, Vol. 112, Issue 11, 2018] |
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== DARKNESS: A Microwave Kinetic Inductance Detector Integral Field Spectrograph for High-contrast Astronomy == |
== [https://iopscience.iop.org/article/10.1088/1538-3873/aab5e7/meta DARKNESS: A Microwave Kinetic Inductance Detector Integral Field Spectrograph for High-contrast Astronomy] == |
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S.R. Meeker, B.A. Mazin, ... G. Vasisht, E. Serabyn |
''S.R. Meeker, B.A. Mazin, ... G. Vasisht, E. Serabyn'' |
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[https://iopscience.iop.org/article/10.1088/1538-3873/aab5e7/meta Astronomical Society of the Pacific, Volume 130, Issue 988, pp. 065001 (2018)] |
[https://iopscience.iop.org/article/10.1088/1538-3873/aab5e7/meta Astronomical Society of the Pacific, Volume 130, Issue 988, pp. 065001 (2018)] |
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== Dielectrophoretic Nanoparticle Aggregation for On-Demand Surface Enhanced Raman Spectroscopy Analysis == |
== [https://doi.org/10.1021/acs.analchem.8b00510 Dielectrophoretic Nanoparticle Aggregation for On-Demand Surface Enhanced Raman Spectroscopy Analysis] == |
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R. Salemmilani, B.D. Piorek, A.W. Fountain, M. Moskovits, C.D. Meinhart |
''R. Salemmilani, B.D. Piorek, A.W. Fountain, M. Moskovits, C.D. Meinhart'' |
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[https://doi.org/10.1021/acs.analchem.8b00510 Analytical Chemistry, 90, 13, 7930-7936 (2018)] |
[https://doi.org/10.1021/acs.analchem.8b00510 Analytical Chemistry, 90, 13, 7930-7936 (2018)] |
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= Demonstration of Constant 8 W/mm Power Density at 10, 30, and 94 GHz in State-of-the-Art Millimeter-Wave N-Polar GaN MISHEMTs = |
== [https://doi.org/10.1109/TED.2017.2770087 Demonstration of Constant 8 W/mm Power Density at 10, 30, and 94 GHz in State-of-the-Art Millimeter-Wave N-Polar GaN MISHEMTs] == |
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B. Romanczyk, S. Wienecke, M. Guidry, H. Li, E. Ahmadi, X. Zheng, S. Keller, U.K. Mishra |
''B. Romanczyk, S. Wienecke, M. Guidry, H. Li, E. Ahmadi, X. Zheng, S. Keller, U.K. Mishra'' |
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[https://doi.org/10.1109/TED.2017.2770087 IEEE Transactions On Electron Devices, Vol. 65, No. 1 (2018)] |
[https://doi.org/10.1109/TED.2017.2770087 IEEE Transactions On Electron Devices, Vol. 65, No. 1 (2018)] |
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== NanoFab making LN2 icecream == |
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Tomorrow the NanoFab will be serving liquid nitrogen ice cream. |
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Latest revision as of 16:36, 18 August 2022
Publications using the Nanofab
250C Process for < 2dB/m Ultra-Low Loss Silicon Nitride Integrated Photonic Waveguides
Debapam Bose, Jiawei Wang, and Daniel J. Blumenthal
0.5T0.5R—An Ultracompact RRAM Cell Uniquely Enabled by van der Waals Heterostructures
D. Zhang, C. -H. Yeh, W. Cao and K. Banerjee
IEEE Transactions on Electron Devices, 68 (4), 2033-2040 (2021)
Laser soliton microcombs heterogeneously integrated on silicon
Chao Xiang, Junqiu Liu, .... Bowers, J.
Science, 373 (650), 99-103 (2021)
Ultrabright Entangled-Photon-Pair Generation from an AlGaAs-On-Insulator Microring Resonator
Trevor J. Steiner, Joshua E. Castro, Lin Chang ... John E. Bowers, and Galan Moody
Visible light photonic integrated Brillouin laser
Chauhan, N., Isichenko, A., Liu, K. ... Blumenthal, D.
Nature Communications, 12, p.4685 (2021)
Optically synchronized fibre links using spectrally pure chip-scale lasers
Brodnik, G.M., Harrington, M.W., Dallyn, J.H. .... Blumenthal, D.
Nature Photonics, 15, 588–593 (2021)
Demonstration of high wall-plug efficiency III-nitride micro-light-emitting diodes with MOCVD-grown tunnel junction contacts using chemical treatments
Matthew S. Wong, Matthew S. Wong ... James Speck, Shuji Nakamura, Steve DenBaars
Appl. Phys. Express A, 14, 086502, 2021
Demonstration of high efficiency cascaded blue and green micro-light-emitting diodes with independent junction control
Panpan Li, Hongjian Li ... James Speck, Shuji Nakamura, Steve DenBaars
Appl. Phys. Lett., 118, 261104, 2021
Room-Temperature Continuous-Wave Electrically Driven Semipolar (202̅1) Blue Laser Diodes Heteroepitaxially Grown on a Sapphire Substrate
Haojun Zhang, Hongjian Li ... James Speck, Shuji Nakamura, Steve DenBaars
ACS Photonics, 7 (7), 1662–1666, 2020
Highly Selective and Vertical Etch of Silicon Dioxide using Ruthenium Films as an Etch Mask
William J. Mitchell, Brian J. Thibeault, Demis D. John, and Thomas E. Reynolds
Journal of Vacuum Science and Technology A, 39, 043204, May 27th 2021
A similar process flow can be found at the Fluorine-ICP Recipe Page.
Stimulated Raman Adiabatic Passage in Optomechanics
Vitaly Fedoseev, Fernando Luna, Ian Hedgepeth, Wolfgang Löffler, and Dirk Bouwmeester
Phys. Rev. Lett., 126, 113601, March 19th 2021
Deuterated silicon dioxide for heterogeneous integration of ultra-low-loss waveguides
Warren Jin, Demis D. John, Jared F. Bauters, Tony Bosch, Brian J. Thibeault, and John E. Bowers
Optics Letters Vol. 45, Issue 12, pp. 3340-3343 (2020)
Quantum supremacy using a programmable superconducting processor
F. Arute, K. Arya, ... Harmut Neven, John M. Martinis
Nature, volume 574, pages 505–510 (2019)
An optical-frequency synthesizer using integrated photonics
D. T. Spencer, T. Drake, ... John E. Bowers, Scott A. Diddams, Scott B. Papp
Nature, volume 557, pages 81–85 (2018)
Continuous-wave operation of m-plane GaN-based vertical-cavity surface-emitting lasers with a tunnel junction intracavity contact
C.A. Forman, S.G. Lee, ... S.P. DenBaars, S. Nakamura
Applied Physics Letters, Vol. 112, Issue 11, 2018
DARKNESS: A Microwave Kinetic Inductance Detector Integral Field Spectrograph for High-contrast Astronomy
S.R. Meeker, B.A. Mazin, ... G. Vasisht, E. Serabyn
Astronomical Society of the Pacific, Volume 130, Issue 988, pp. 065001 (2018)
Dielectrophoretic Nanoparticle Aggregation for On-Demand Surface Enhanced Raman Spectroscopy Analysis
R. Salemmilani, B.D. Piorek, A.W. Fountain, M. Moskovits, C.D. Meinhart
Analytical Chemistry, 90, 13, 7930-7936 (2018)
Demonstration of Constant 8 W/mm Power Density at 10, 30, and 94 GHz in State-of-the-Art Millimeter-Wave N-Polar GaN MISHEMTs
B. Romanczyk, S. Wienecke, M. Guidry, H. Li, E. Ahmadi, X. Zheng, S. Keller, U.K. Mishra
IEEE Transactions On Electron Devices, Vol. 65, No. 1 (2018)