E-Beam 5 (Plasys)

E-Beam 5 (Plasys) File:E-beam5.jpg Location Bay 3 Tool Type Vacuum Deposition Manufacturer Plasys Inc. Description Single-wafer motorized evaporator Primary Supervisor Michael Barreraz (805) 893-4147 mikebarreraz@ece.ucsb.edu Secondary Supervisor Don Freeborn Recipes Vacuum Deposition Recipes SignupMonkey: Sign up for this tool

About

The Plasys is a single-wafer load evaporator with programmable wafer angle, wafer rotation, ion-mill pre-cleaning and oxygen flow capabilities, in situ while keeping the wafer under vaccuum.

Only Aluminum is currently installed.

The system is currently dedicated only to specific use-cases such as superconducting aluminum evap.

Materials and Recipes allowed are tightly controlled. Please contact the supervisor to find out if your application is allowed on this machine.

Detailed Specifications

• To Be Added

Documentation

• EBeam5_-_Operating_Instructions

Recipes

• To Be Added