Template:Announcements: Difference between revisions
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=====Lab |
=====NanoFan Lab is UP===== |
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The cleanroom is back up and running and you are welcomed back into the lab. Please check your emails for individual equipment status. Sorry for the inconvenience. |
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To accommodate an annual test of the back-up generator we will be shutting down the lab on Wednesday June 14th from 7am to 8am. |
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//11:32, 14 June 2023 (PDT) |
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Please be out of the lab during this time. |
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//[[User:Mehalana v|Vraj Mehalana]] 15:36, 9 June 2023 (PDT) |
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=====Unaxis ICP-PECVD is DOWN===== |
=====Unaxis ICP-PECVD is DOWN===== |
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I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
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Revision as of 18:32, 14 June 2023
NanoFan Lab is UP
The cleanroom is back up and running and you are welcomed back into the lab. Please check your emails for individual equipment status. Sorry for the inconvenience. //11:32, 14 June 2023 (PDT)
Unaxis ICP-PECVD is DOWN
I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.-Tony //Vraj Mehalana 09:25, 30 May 2023 (PDT)
Plasma Activation (EVG 810)
We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. Runs will still require Staff supervision until then. //Vraj Mehalana 18:01, 2 May 2023 (PDT)