Template:Announcements: Difference between revisions
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//[[User:Mehalana v|Vraj Mehalana]] 11:11, 23 October 2023 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 11:11, 23 October 2023 (PDT) |
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=====Unaxis ICP-PECVD is UP for Non-GapFill===== |
=====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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We are still working on an improved GapFill recipe. |
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Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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To allow your processes through, on Monday EVENING at 5pm we will allow the old "450W GapFill" recipe to be run, |
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Please plan your process accordingly. |
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Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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- starting Monday Oct 30th, evening at 5pm, |
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- ending Wed Nov 1st, morning at 6am. |
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Reminder: You may NOT run the 450W recipe outside these allowed times, and you may Not modify our recipes apart from Dep/Clean TIME. |
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Let me know if you have any questions. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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Revision as of 21:51, 26 October 2023
EBeam2 UP
Test run completed without issue. System is ready to use, EXCEPT for heater - contact supervisor for heater use. See email for updates to operating procedure.
//Vraj Mehalana 11:48, 26 October 2023 (PDT)
ProbeStation scheduled IT maintenance
The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates :
- 10-30-23
- 10-31-23
Please plan your work activities accordingly.
//Vraj Mehalana 11:58, 17 October 2023 (PDT)
PECVD2 is UP
Initially it was planned to remove the hoist again to rebuild it to solve the leak.
The manufacturer is sending out a rebuild kit under warranty since it is a brand new hoist that is leaking. When that arrives I will schedule another all day event to rebuild the hoist.
I cleaned up the leaked oil, checked oil level, and did an inspection of the tool. System is back up and available for use.
//Vraj Mehalana 11:11, 23 October 2023 (PDT)
Unaxis ICP-PECVD is UP for Non-GapFill
We are still working on an improved GapFill recipe.
To allow your processes through, on Monday EVENING at 5pm we will allow the old "450W GapFill" recipe to be run,
- starting Monday Oct 30th, evening at 5pm,
- ending Wed Nov 1st, morning at 6am.
Reminder: You may NOT run the 450W recipe outside these allowed times, and you may Not modify our recipes apart from Dep/Clean TIME.
Let me know if you have any questions.
//Vraj Mehalana 09:55, 11 October 2023 (PDT)
Wafer Bonder, (Suss SB6-8E)
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.
//Vraj Mehalana 09:59, 20 September 2023 (PDT)
EVG Activation: Up
The FSE has completed the work on the tool and I have made several test runs without issue.
IMPORTANT - Please see corresponding email for changes in operation.
//Vraj Mehalana 15:58, 24 October 2023 (PDT)