Template:Announcements: Difference between revisions
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=====Atomic Force Microscope (Dimension ICON) - 05/08: AFM Head needs repair===== |
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I will have to take the AFM head unit back to Bruker for repair. The height sensor failed all the tests I tried so the Z-piezo/strain gauge unit will most likely need to be replaced. SO for the foreseeable future, the AFM is down.--Demis |
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I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
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Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.- |
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=====MA6 TSA is down - Update===== |
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After working with our FSE over the phone, we feel the culprit is a bound up Y axis motor for the top side microscope. Unfortunately, this axis is at the bottom of the microscope assembly and will require the removal of both the X and Z axis sub assemblies. I am awaiting proper instructions on how to dismantle all of this and the FSE is also checking with some of their contacts to see if there is an easier solution. |
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Tony |
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I have been asked by a few users about using the tool in TSA mode for exposures that do not require alignment even through the topside microscope is not functional. I have just tested the tool in TSA mode and it will work like this, just note that the topside microscope will not come down. |
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-Lee |
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We received the new Xe bottle, and it was installed, leak checked, and tested without issue. |
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IBD is back up and available for use. |
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I apologize for any inconvenience. |
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//[[User:Mehalana v|Vraj Mehalana]] |
//[[User:Mehalana v|Vraj Mehalana]] 14:41, 13 May 2024 (PDT) |
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=====Plasma Activation (EVG 810)===== |
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We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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Runs will still require Staff supervision until then. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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=====ASML optics replacement May 20th-22nd===== |
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We will be performing beam delivery optics replacement on Mon May 20th to 22nd, to resolve a low intensity reading. The tool will be unavailable during this time.e. |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Revision as of 21:41, 13 May 2024
Atomic Force Microscope (Dimension ICON) - 05/08: AFM Head needs repair
I will have to take the AFM head unit back to Bruker for repair. The height sensor failed all the tests I tried so the Z-piezo/strain gauge unit will most likely need to be replaced. SO for the foreseeable future, the AFM is down.--Demis
//Vraj Mehalana 13:42, 9 May 2024 (PDT)
MA6 TSA is down - Update
After working with our FSE over the phone, we feel the culprit is a bound up Y axis motor for the top side microscope. Unfortunately, this axis is at the bottom of the microscope assembly and will require the removal of both the X and Z axis sub assemblies. I am awaiting proper instructions on how to dismantle all of this and the FSE is also checking with some of their contacts to see if there is an easier solution.
I have been asked by a few users about using the tool in TSA mode for exposures that do not require alignment even through the topside microscope is not functional. I have just tested the tool in TSA mode and it will work like this, just note that the topside microscope will not come down.
-Lee
//Vraj Mehalana 14:41, 13 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
ASML optics replacement May 20th-22nd
We will be performing beam delivery optics replacement on Mon May 20th to 22nd, to resolve a low intensity reading. The tool will be unavailable during this time.e.
//Vraj Mehalana 09:40, 9 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)