Template:Announcements: Difference between revisions
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//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 10:58, 30 April 2024 (PDT) |
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=====Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics===== |
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=====ASML optics replacement May 20th-22nd===== |
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We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system. |
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We will be performing beam delivery optics replacement on Mon May 20th to 22nd, to resolve a low intensity reading. The tool will be unavailable during this time.e. |
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Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work. |
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Sorry for the inconvenience. |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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Revision as of 02:04, 22 May 2024
Atomic Force Microscope (Dimension ICON) - 05/17: System UP
Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!
//Vraj Mehalana 13:46, 20 May 2024 (PDT)
MA6 TSA is down - Update
Multiple attempts to unbind the Y axis motor have been unsuccessful. The motor may have failed so I am waiting to hear back on Suss about availability and lead time.
If you are in desperate need of using the tool with the topside microscope, CNSI's Quantum Structures Facility has one available for use:
https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication
-Lee
//Vraj Mehalana 14:41, 13 May 2024 (PDT)
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
Stepper #3 (ASML DUV) - Pneumatics repaired, extra day for optics
We were able to repair the pneumatics issue and are currently running reticle and wafer reproducability runs overnight to exercise/test the system.
Consequently the optics was only started today, so will take one day longer than planned - we will extend this visit to Thursday to complete the work.
Sorry for the inconvenience.
//Vraj Mehalana 19:04, 21 May 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)