Difference between revisions of "Template:Announcements"
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− | ===== |
+ | =====Velion FIB Tool DOWN===== |
− | The cleanroom is back up and running and you are welcomed back into the lab. Please check your emails for individual equipment status. Sorry for the inconvenience. |
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+ | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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− | //11:32, 14 June 2023 (PDT) |
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− | =====Unaxis ICP-PECVD is DOWN===== |
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− | I removed the wafer that was stuck in the process chamber. Once again it was user error. You MUST remove ALL of the resist from the outer 5-7mm of your wafer when processing with 100mm substrates. |
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− | Sadly the system is still down. I looked into the RF1 tuning issues and it looks as though it has failed completely. I tried replacing the AMT controller but the failure mode didn't change. I did notice that when I placed the AMT controller in Manual and tried to drive the caps the matching network was unresponsive. It looks like the matching network may need to be replaced.-Tony |
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+ | =====ICP1 Down===== |
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+ | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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− | =====Plasma Activation (EVG 810)===== |
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− | We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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− | Runs will still require Staff supervision until then. |
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+ | =====Lab Access Changes: Symmetry App===== |
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+ | The iris scanner has been decommissioned. Please use the card reader which supports: |
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+ | -Physical card |
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+ | -Mobile phone via Symmetry App |
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+ | //[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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+ | =====Wafer Bonder, (Suss SB6-8E)===== |
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+ | SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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+ | //[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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− | <!------------- Equipment Status ----------------> |
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Revision as of 15:07, 27 June 2024
Velion FIB Tool DOWN
Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.
//Vraj Mehalana 10:58, 30 April 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)