Difference between revisions of "Template:Announcements"
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| − | ===== |
+ | =====Unaxis ICP-PECVD Update===== |
| + | Unfortunately the shipment of repaired parts was significantly delayed. I will be installing them and testing on Tuesday. With any luck the system will be available Tuesday evening. |
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| − | We’ve run a day and a half of different recipes and haven’t seen a single issue. The standard DSE (Bosch) process has been qualified and everything is consistent with previous runs. For sensitive etches it’s recommended to do a test run to check for any process drift. Tool is free to use. |
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| + | Tony |
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| − | //13:47, 26 February 2024 (PST) |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 16:26, 26 July 2024 (PDT) |
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| − | =====PlasmaTherm DSEIII is down - Update===== |
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| − | We were able to start running recipes last night but we found the C4F8 MFC wasn’t controlling. I’ve ordered a new MFC that’s due to be on site Tuesday morning. If all goes well the tool should be up that afternoon. |
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| − | //[[User:John_d|Demis D. John]] 11:18, 23 February 2024 (PST) |
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| − | ===== |
+ | =====Dicing Saw Service Visit===== |
| + | The annual PM on the tool has been completed. However, there is still the issue with the chuck not rotating a perfect 90 degrees after aligning the first angle, so you will still have to perform alignment for angle #2. ADT is looking into sending us a cal plate to try and rectify this as the first potential solution. |
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| − | Some additional work is needed on the replacement board that we are waiting on. I have been informed that it will not be shipping until after the 20th (no solid date). |
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| − | //[[User:John_d|Demis D. John]] 11:18, 23 February 2024 (PST) |
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| + | -Lee |
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| − | RIE 5 is up except for processes that use SiCl4. |
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| + | //[[User:Mehalana v|Vraj Mehalana]] 10:23, 8 July 2024 (PDT) |
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| − | =====EBeam3 Transfer Arm Upgrade - Postponed===== |
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| − | The Transfer Arm upgrade has been postponed again, this time due to motor driver compatibility issues. |
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| − | I am waiting to hear back from the manufacturer so at this time I can not reschedule yet. |
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| + | Raith service have completed the source change, resolved the power supply and column alignment issues, and restored the Pt deposition capability to full capacity. With remote assistance from Raith I will run some calibrations and stability tests over the next few days. After that I will return the tool to general use towards the end of the week. |
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| + | The new ion source is AuGeSi. We have no plans to return to GaBiLi for the foreseeable future. Please get in contact if you have any questions. |
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| − | I will send another notification when everything has been worked out, and I am ready to schedule the installation. |
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| − | //[[User:John_d|Demis D. John]] 11:56, 13 February 2024 (PST) |
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| + | -Dan |
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| − | =====Job Opening: Process Engineer===== |
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| − | The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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| − | //[[User: |
+ | //[[User:Mehalana v|Vraj Mehalana]] 10:23, 8 July 2024 (PDT) |
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=====Lab Access Changes: Symmetry App===== |
=====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| − | Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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| − | // [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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| + | -Physical card |
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| + | -Mobile phone via Symmetry App |
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| + | |||
| + | //[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| + | |||
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Revision as of 16:26, 26 July 2024
Unaxis ICP-PECVD Update
Unfortunately the shipment of repaired parts was significantly delayed. I will be installing them and testing on Tuesday. With any luck the system will be available Tuesday evening.
Tony
//Vraj Mehalana 16:26, 26 July 2024 (PDT)
Dicing Saw Service Visit
The annual PM on the tool has been completed. However, there is still the issue with the chuck not rotating a perfect 90 degrees after aligning the first angle, so you will still have to perform alignment for angle #2. ADT is looking into sending us a cal plate to try and rectify this as the first potential solution.
-Lee
//Vraj Mehalana 10:23, 8 July 2024 (PDT)
Velion FIB Tool DOWN
Raith service have completed the source change, resolved the power supply and column alignment issues, and restored the Pt deposition capability to full capacity. With remote assistance from Raith I will run some calibrations and stability tests over the next few days. After that I will return the tool to general use towards the end of the week.
The new ion source is AuGeSi. We have no plans to return to GaBiLi for the foreseeable future. Please get in contact if you have any questions.
-Dan
//Vraj Mehalana 10:23, 8 July 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
//Vraj Mehalana 14:23, 13 December 2023 (PST)