Difference between revisions of "Template:Announcements"
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| − | ===== |
+ | =====Unaxis ICP-PECVD Update===== |
| + | Unfortunately the shipment of repaired parts was significantly delayed. I will be installing them and testing on Tuesday. With any luck the system will be available Tuesday evening. |
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| − | EBeam4 will remain down overnight. |
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| + | Tony |
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| − | The new motor arrived as well as the new junction box and new cables. |
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| − | I removed the old junction box/plugs due to a lot of corrosion inside the box caused by it being located directly under the water supply lines. |
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| + | =====Dicing Saw Service Visit===== |
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| − | This corrosion inside the box could have contributed to the failure of the old motor. |
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| + | The annual PM on the tool has been completed. However, there is still the issue with the chuck not rotating a perfect 90 degrees after aligning the first angle, so you will still have to perform alignment for angle #2. ADT is looking into sending us a cal plate to try and rectify this as the first potential solution. |
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| − | I installed the new motor, ran all new cables to the new junction box in it's new location away from the water lines. |
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| − | I was able to test the function of the hoist by raising and lowering the bell jar while in manual mode. |
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| − | For safety reasons, I had the machine powered off during the duration of the work being done, so the cryo will be in regen overnight. |
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| + | Raith service have completed the source change, resolved the power supply and column alignment issues, and restored the Pt deposition capability to full capacity. With remote assistance from Raith I will run some calibrations and stability tests over the next few days. After that I will return the tool to general use towards the end of the week. |
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| + | The new ion source is AuGeSi. We have no plans to return to GaBiLi for the foreseeable future. Please get in contact if you have any questions. |
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| − | Tomorrow morning I will continue testing the system to ensure everything is working properly before I release the tool. |
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| + | -Dan |
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| − | I will send another email when an update is available. |
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| − | //10: |
+ | //[[User:Mehalana v|Vraj Mehalana]] 10:23, 8 July 2024 (PDT) |
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| − | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
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| − | We have finished calibrations, |
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| − | System is up. |
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| − | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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| − | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| − | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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| − | =====MA6 TSA is down - Update===== |
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| − | We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool. |
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| − | The tool remains up for backside alignment and topside exposures that do not require alignment. |
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| ⚫ | |||
| − | //15:59, 22 May 2024 (PDT) |
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| − | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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-Mobile phone via Symmetry App |
-Mobile phone via Symmetry App |
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| − | // |
+ | //[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
=====Wafer Bonder, (Suss SB6-8E)===== |
=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| + | |||
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Revision as of 16:26, 26 July 2024
Unaxis ICP-PECVD Update
Unfortunately the shipment of repaired parts was significantly delayed. I will be installing them and testing on Tuesday. With any luck the system will be available Tuesday evening.
Tony
//Vraj Mehalana 16:26, 26 July 2024 (PDT)
Dicing Saw Service Visit
The annual PM on the tool has been completed. However, there is still the issue with the chuck not rotating a perfect 90 degrees after aligning the first angle, so you will still have to perform alignment for angle #2. ADT is looking into sending us a cal plate to try and rectify this as the first potential solution.
-Lee
//Vraj Mehalana 10:23, 8 July 2024 (PDT)
Velion FIB Tool DOWN
Raith service have completed the source change, resolved the power supply and column alignment issues, and restored the Pt deposition capability to full capacity. With remote assistance from Raith I will run some calibrations and stability tests over the next few days. After that I will return the tool to general use towards the end of the week.
The new ion source is AuGeSi. We have no plans to return to GaBiLi for the foreseeable future. Please get in contact if you have any questions.
-Dan
//Vraj Mehalana 10:23, 8 July 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
//Vraj Mehalana 14:23, 13 December 2023 (PST)