Difference between revisions of "Template:Announcements"
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| − | ===== |
+ | =====Unaxis ICP-PECVD Update===== |
| + | Unfortunately the shipment of repaired parts was significantly delayed. I will be installing them and testing on Tuesday. With any luck the system will be available Tuesday evening. |
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| − | The MLA will be receiving its biannual service the week of June 24. The work will be performed from Monday 6/24 through Thursday 6/27. They plan to have the work completed in 3 days but want to have the 4th day available if needed. The tool will very likely be unavailable overnight Monday but should be available the rest of the |
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| − | evenings. |
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| ⚫ | |||
| − | //15:59, 4 June 2024 (PDT) |
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| + | Tony |
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| − | =====EBeam4 is up===== |
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| − | EBeam4 is back up. |
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| ⚫ | |||
| − | The overnight regen of the cryo was completed this morning. |
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| − | I then tested the operation of the hoist numerous times without issue. |
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| − | I tested the EBeam by running 200A of Ti without issue. |
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| + | =====Dicing Saw Service Visit===== |
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| − | System UP |
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| + | The annual PM on the tool has been completed. However, there is still the issue with the chuck not rotating a perfect 90 degrees after aligning the first angle, so you will still have to perform alignment for angle #2. ADT is looking into sending us a cal plate to try and rectify this as the first potential solution. |
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| ⚫ | |||
| − | //10:36, 30 May 2024 (PDT) |
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| ⚫ | |||
| − | =====Stepper #1 (GCA 6300) - Tool availability===== |
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| − | Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times: |
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| ⚫ | |||
| − | 6-18-24 at 8:00am |
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| + | Raith service have completed the source change, resolved the power supply and column alignment issues, and restored the Pt deposition capability to full capacity. With remote assistance from Raith I will run some calibrations and stability tests over the next few days. After that I will return the tool to general use towards the end of the week. |
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| − | Till |
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| − | 6-20-24 at 5:00pm |
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| + | The new ion source is AuGeSi. We have no plans to return to GaBiLi for the foreseeable future. Please get in contact if you have any questions. |
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| − | Please plan your processing activities accordingly. |
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| − | //13:32, 1 June 2024 (PDT) |
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| + | -Dan |
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| − | =====Stepper #2 (GCA Autostep 200) - Tool availability===== |
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| − | Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times: |
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| ⚫ | |||
| − | 6-21-24 at 8:00am |
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| − | Till |
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| − | 6-21-24 at 5:00pm |
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| − | |||
| − | Please plan your processing activities accordingly. |
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| − | |||
| − | Thanks |
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| − | Bill Millerski |
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| − | UCSB |
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| − | //13:32, 1 June 2024 (PDT) |
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| − | |||
| − | =====Stepper #3 (ASML DUV) - System UP and calibrated===== |
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| − | We have finished calibrations, |
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| − | System is up. |
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| − | |||
| − | Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. |
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| − | |||
| − | =====Unaxis VLR still Down===== |
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| − | |||
| − | The chiller has a decent sized ball of ice inside of it. |
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| − | |||
| − | I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. |
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| − | //13:29, 1 June 2024 (PDT) |
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| − | |||
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| − | |||
| − | =====Atomic Force Microscope (Dimension ICON) - 05/17: System UP===== |
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| − | Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! |
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| − | |||
| − | //[[User:Mehalana v|Vraj Mehalana]] 13:46, 20 May 2024 (PDT) |
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| − | |||
| − | =====MA6 TSA is down - Update===== |
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| − | Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience. |
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| − | |||
| − | Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools: |
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| − | |||
| − | https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication |
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| − | |||
| − | -Lee |
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| − | //15:59, 22 May 2024 (PDT) |
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| − | |||
| ⚫ | |||
| − | Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. |
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| − | |||
| ⚫ | |||
=====ICP1 Down===== |
=====ICP1 Down===== |
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-Mobile phone via Symmetry App |
-Mobile phone via Symmetry App |
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| − | // |
+ | //[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
=====Wafer Bonder, (Suss SB6-8E)===== |
=====Wafer Bonder, (Suss SB6-8E)===== |
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SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. |
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| + | |||
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Revision as of 16:26, 26 July 2024
Unaxis ICP-PECVD Update
Unfortunately the shipment of repaired parts was significantly delayed. I will be installing them and testing on Tuesday. With any luck the system will be available Tuesday evening.
Tony
//Vraj Mehalana 16:26, 26 July 2024 (PDT)
Dicing Saw Service Visit
The annual PM on the tool has been completed. However, there is still the issue with the chuck not rotating a perfect 90 degrees after aligning the first angle, so you will still have to perform alignment for angle #2. ADT is looking into sending us a cal plate to try and rectify this as the first potential solution.
-Lee
//Vraj Mehalana 10:23, 8 July 2024 (PDT)
Velion FIB Tool DOWN
Raith service have completed the source change, resolved the power supply and column alignment issues, and restored the Pt deposition capability to full capacity. With remote assistance from Raith I will run some calibrations and stability tests over the next few days. After that I will return the tool to general use towards the end of the week.
The new ion source is AuGeSi. We have no plans to return to GaBiLi for the foreseeable future. Please get in contact if you have any questions.
-Dan
//Vraj Mehalana 10:23, 8 July 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)
Wafer Bonder, (Suss SB6-8E)
SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date.
//Vraj Mehalana 14:23, 13 December 2023 (PST)