Decomissioned Tools

This is a list of tools that are No Longer Available, but the data may be useful for recipes or other utility and are listed here only for informational purposes.

Tool recipes can often be found linked on the bottom of the tool's page.

These pages are not guaranteed to be kept available and may be removed at any time.

Lithography

• Nano-Imprint (Nanonex NX2000)

Vacuum Deposition

• RIE 3 (MRC)

Dry Etching

• ICP-Etch (Unaxis VLR)