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===DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies=== |
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=== Filmetrics Optical Measurement Systems === |
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[https://viterbischool.usc.edu/news/2024/09/usc-viterbi-led-ca-dreams-hub-is-awarded-31-9-million-in-funding-under-the-microelectronics-commons/ CA DREAMS Hub is awarded $31.9 million in funding under the Microelectronics Commons] - |
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A [[Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)|Filmetrics F10-RT]] for optical reflection/transmission spectra, and a [[Optical Film Thickness & Wafer-Mapping (Filmetrics F50)|Filmetrics F50]] thin-film wafer-mapping system have been installed. Contact Ning Cao for more info. |
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* $16.2 Million to develop advanced gallium nitride (GaN) semiconductor technologies, with partners including USC, Northrop Grumman, Teledyne Technologies, HRL Laboratories, PseudolithIC, Monde Wireless Inc., Transphorm, UCLA and UC Santa Barbara. |
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=== KLA Tencor Profilometer Installed === |
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* $15.7 Million in Funding for 5G/6G millimeter-wave Phased-Array Prototypes, with team USC, Northrop Grumman, HRL Laboratories, Teledyne, Caltech, UCLA, UC Santa Barbara, UC San Diego, Vorago, Global Foundries. |
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We have purchased a new [[Step Profilometer (KLA Tencor P-7)|KLA Tencor Stylus Profilometer]], that has been installed in Bay 4. |
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=== Laser Endpoint Monitors === |
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We've installed new [http://www.intellemetrics.com/LEP.htm Intellemetrics LEP500 Laser Endpoint Detection] monitoring on the [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|DSEiii]] & [[ICP_Etch_2_(Panasonic_E640)|ICP#2]] & [[ICP_Etch_1_(Panasonic_E626I)|ICP#1]] etchers. This allows you to terminate your etch at a calibrated/modeled distance into a layer, and removes the need to calibrate etch rates for most processes. |
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// [[User:John d|John d]] 09:26, 17 July 2018 (PDT) |
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===NSF-ATE Award for SBCC and UCSB: New Semiconductor Pathway=== |
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=== Metal Processes on the Atomic Layer Deposition === |
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The UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build a semiconductor pathway (associates degree or certificate) at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "[https://www.nsf.gov/awardsearch/showAward?AWD_ID=2400982 Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education]" is one of 6 projects funded by an [https://new.nsf.gov/news/nsf-invests-76m-educational-projects-build-skilled Intel-NSF partnership.] The project builds on the existing "[https://nanofab.ucsb.edu/workforce#bootcamps Cleanroom Bootcamps]" already being run twice a year in the [https://www.cnsi.ucsb.edu/facilities/quantum-structures CNSI QSF cleanroom]. // [[User:John_d|Demis D. John]] 13:15, 14 August 2024 (PDT) |
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We now have Ruthenium (Ru) and Platinum (Pt) metal depositions developed on the [[Atomic_Layer_Deposition_(Oxford_FlexAL)|Oxford FlexAL ALD]] tool. See the [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition: Recipes]] page or contact [[Bill_Mitchell|Bill Mitchell]] for more information. |
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// [[User:John d|Posted:]] 16:07, 01 June 2017 (PST) |
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===CHIPS Act Award Announced to USC and UCSB NanoFab=== |
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=== New Deep Silicon Etcher Online === |
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[https://carbajal.house.gov/news/documentsingle.aspx?DocumentID=1672 U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab] on receiving a [https://www.nist.gov/chips CHIPS & Science Act] award, as part of the [https://microelectronicscommons.org/ California DREAMS Hub (Microelectronics Commons) led by USC]. |
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A new [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|Plasma-Therm Versaline DSE III DRIE etcher]] has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. An Intellemetrics LEP500 laser end point monitor has also been installed on the system. |
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-- [[User:John d|Demis]] 12:06, 4 October 2023 (PDT) |
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=== RIE#3 Removed === |
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We have removed [[RIE_3_(MRC)|RIE#3]] from the Nanofab, it has gone to the [https://www.ece.ucsb.edu/department-resources/electronics-shop/tcr Teaching Cleanroom]. All user's processes have been transferred to the [[Fluorine_ICP_Etcher_(PlasmaTherm/SLR_Fluorine_ICP)|Fluorine ICP Etcher]]. // [[User:John_d|Demis D. John]] 15:58, 6 August 2024 (PDT) |
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See the May 2016 {{file|Survey052016.pdf| User Survey Results}}. |
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// [[User:Thibeault|Posted:]] 12:00, 01 May 2016 (PST) |
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=== NanoFab staff awarded Goleta's Innovator of the Year 2023 === |
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=== CAIBE Ion Mill Available === |
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NanoFab staff member [[Demis D. John]] has been awarded the ''City of Goleta's "Innovator of the Year"'' for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the [https://sbscchamber.com/goletas-finest-2023-award-recipients-announced/ full announcement by the Santa Barbara South Coast Chamber of Commerce]. // [[User:John d|Demis D. John]] 13:58, 7 November 2023 (PST) |
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The [[CAIBE (Oxford Ion Mill)]] is up and running! Contact [[Brian Lingg]] for more information. |
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// [[User:Thibeault|Posted:]] 12:00, 01 July 2015 (PST) |
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=== NanoFab Featured in Regional Tech Videos === |
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=== NanoFiles SFTP Online === |
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The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry. |
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Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check [http://signupmonkey.ece.ucsb.edu SignupMonkey] for details. |
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// [[User:Thibeault|Posted:]] 12:00, 07 July 2013 (PST) |
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See the videos here: |
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{| class="wikitable" |
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|[https://fast.wistia.net/embed/iframe/l46hsnwg4b?controlsVisibleOnLoad=true&muted=0&playerColor©LinkAndThumbnailEnabled=false '''''Santa Barbara County: This is TechTopia'''''] [[File:Techtopia_Vid_-_Thumbnail_PlayButton.jpg|none|300x300px|link=https://fast.wistia.net/embed/iframe/l46hsnwg4b?controlsVisibleOnLoad=true&muted=0&playerColor©LinkAndThumbnailEnabled=false]] |
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|[https://www.youtube.com/watch?v=op746os6eRI '''''UCSB NanoFab: An Innovation Center'''''] [[File:NanoFab_COE_Engineering_Vid_-_thumbnail_2_crop.jpg|none|300x300px|link=https://www.youtube.com/watch?v=op746os6eRI]] |
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Latest revision as of 00:52, 3 October 2024
News from the U.C. Santa Barbara Nanofabrication Facility.
DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies
CA DREAMS Hub is awarded $31.9 million in funding under the Microelectronics Commons -
- $16.2 Million to develop advanced gallium nitride (GaN) semiconductor technologies, with partners including USC, Northrop Grumman, Teledyne Technologies, HRL Laboratories, PseudolithIC, Monde Wireless Inc., Transphorm, UCLA and UC Santa Barbara.
- $15.7 Million in Funding for 5G/6G millimeter-wave Phased-Array Prototypes, with team USC, Northrop Grumman, HRL Laboratories, Teledyne, Caltech, UCLA, UC Santa Barbara, UC San Diego, Vorago, Global Foundries.
// Demis D. John 16:32, 23 September 2024 (PDT)
NSF-ATE Award for SBCC and UCSB: New Semiconductor Pathway
The UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build a semiconductor pathway (associates degree or certificate) at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education" is one of 6 projects funded by an Intel-NSF partnership. The project builds on the existing "Cleanroom Bootcamps" already being run twice a year in the CNSI QSF cleanroom. // Demis D. John 13:15, 14 August 2024 (PDT)
CHIPS Act Award Announced to USC and UCSB NanoFab
U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. -- Demis 12:06, 4 October 2023 (PDT)
RIE#3 Removed
We have removed RIE#3 from the Nanofab, it has gone to the Teaching Cleanroom. All user's processes have been transferred to the Fluorine ICP Etcher. // Demis D. John 15:58, 6 August 2024 (PDT)
NanoFab staff awarded Goleta's Innovator of the Year 2023
NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. // Demis D. John 13:58, 7 November 2023 (PST)
NanoFab Featured in Regional Tech Videos
The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry.
See the videos here:
Santa Barbara County: This is TechTopia | UCSB NanoFab: An Innovation Center |
// John d 09:26, 1 November 2023 (PST)
See older articles at this link