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===DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies===
[https://viterbischool.usc.edu/news/2024/09/usc-viterbi-led-ca-dreams-hub-is-awarded-31-9-million-in-funding-under-the-microelectronics-commons/ CA DREAMS Hub is awarded $31.9 million in funding under the Microelectronics Commons] -


* $16.2 Million to develop advanced gallium nitride (GaN) semiconductor technologies, with partners including USC, Northrop Grumman, Teledyne Technologies, HRL Laboratories, PseudolithIC, Monde Wireless Inc., Transphorm, UCLA and UC Santa Barbara.
=== New Rapid Thermal Annealer Installation ===
* $15.7 Million in Funding for 5G/6G millimeter-wave Phased-Array Prototypes, with team USC, Northrop Grumman, HRL Laboratories, Teledyne, Caltech, UCLA, UC Santa Barbara, UC San Diego, Vorago, Global Foundries.
We are installing an qualifying a new [http://ssi-rtp.com/page/products/rtp-solaris-150/ SSI ''Solaris 150 Rapid Thermal Processor'']. We will make an announcement when the system is ready and trainings are scheduled.
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// [[User:John d|John d]] 12:03, 28 May 2019 (PDT)


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// [[User:John_d|Demis D. John]] 16:32, 23 September 2024 (PDT)
=== S-Cubed Spin/Coat/Dev Station Installation ===
We are currently in the process of installing a Cube system for automated Spin Coating, Baking, Developing and Edge-Bead Removal on 4-inch and 6-inch wafers. Initially this tool will be solely purposed for Staff and the use of the sponsor, primarily for [[Stepper 3 (ASML DUV)|ASML DUV Stepper]] wafer prep. As procedures are developed, the system will be opened up for use by all ASML Stepper users, and may eventually be opened for I-Line stepper use as well.
// [[User:John d|John d]] 12:10, 20 February 2019 (PST)


===NSF-ATE Award for SBCC and UCSB: New Semiconductor Pathway===
=== Filmetrics Optical Profilometer ===
The UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build a semiconductor pathway (associates degree or certificate) at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "[https://www.nsf.gov/awardsearch/showAward?AWD_ID=2400982 Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education]" is one of 6 projects funded by an [https://new.nsf.gov/news/nsf-invests-76m-educational-projects-build-skilled Intel-NSF partnership.] The project builds on the existing "[https://nanofab.ucsb.edu/workforce#bootcamps Cleanroom Bootcamps]" already being run twice a year in the [https://www.cnsi.ucsb.edu/facilities/quantum-structures CNSI QSF cleanroom]. // [[User:John_d|Demis D. John]] 13:15, 14 August 2024 (PDT)
A new [https://www.filmetrics.com/profilometers/profilm3d Filmetrics Profilm3D] optical profilometer is being qualified. The system complements the [[Laser_Scanning_Confocal_M-scope_(Olympus_LEXT)|LEXT Confocal Microscope]] and [[Atomic Force Microscope (Bruker ICON)|AFM]], by providing large-area profiles (~5-10mm square) with nanometer-level height resolution, and possibly a fast surface roughness measurement. See the [[White-Light/Phase-Shift_Interference_Profilometer_(Filmetrics_Profilm3D)|Profilm3D Wiki Page]] for more info on the capabilities and techniques.
// [[User:John d|John d]] 10:59, 14 December 2018 (PST)


===CHIPS Act Award Announced to USC and UCSB NanoFab===
=== Filmetrics Optical Measurement Systems ===
[https://carbajal.house.gov/news/documentsingle.aspx?DocumentID=1672 U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab] on receiving a [https://www.nist.gov/chips CHIPS & Science Act] award, as part of the [https://microelectronicscommons.org/ California DREAMS Hub (Microelectronics Commons) led by USC].
A [[Optical Film Spectra + Optical Properties (Filmetrics F10-RT-UVX)|Filmetrics F10-RT]] for optical reflection/transmission spectra, and a [[Optical Film Thickness & Wafer-Mapping (Filmetrics F50)|Filmetrics F50]] thin-film wafer-mapping system have been installed. Contact Ning Cao for more info.
// [[User:John d|John d]] 15:24, 12 December 2018 (PST)
-- [[User:John d|Demis]] 12:06, 4 October 2023 (PDT)


=== KLA Tencor Profilometer Installed ===
=== RIE#3 Removed ===
We have removed [[RIE_3_(MRC)|RIE#3]] from the Nanofab, it has gone to the [https://www.ece.ucsb.edu/department-resources/electronics-shop/tcr Teaching Cleanroom]. All user's processes have been transferred to the [[Fluorine_ICP_Etcher_(PlasmaTherm/SLR_Fluorine_ICP)|Fluorine ICP Etcher]]. // [[User:John_d|Demis D. John]] 15:58, 6 August 2024 (PDT)
We have purchased a new [[Step Profilometer (KLA Tencor P-7)|KLA Tencor Stylus Profilometer]], that has been installed in Bay 4.
⚫
// [[User:John d|John d]] 17:28, 12 September 2018 (PDT)


=== NanoFab staff awarded Goleta's Innovator of the Year 2023 ===
=== Laser Endpoint Monitors ===
NanoFab staff member [[Demis D. John]] has been awarded the ''City of Goleta's "Innovator of the Year"'' for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the [https://sbscchamber.com/goletas-finest-2023-award-recipients-announced/ full announcement by the Santa Barbara South Coast Chamber of Commerce]. // [[User:John d|Demis D. John]] 13:58, 7 November 2023 (PST)
We've installed new [http://www.intellemetrics.com/LEP.htm Intellemetrics LEP500 Laser Endpoint Detection] monitoring on the [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|DSEiii]] & [[ICP_Etch_2_(Panasonic_E640)|ICP#2]] & [[ICP_Etch_1_(Panasonic_E626I)|ICP#1]] etchers. This allows you to terminate your etch at a calibrated/modeled distance into a layer, and removes the need to calibrate etch rates for most processes.
// [[User:John d|John d]] 09:26, 17 July 2018 (PDT)


=== Metal Processes on the Atomic Layer Deposition ===
=== NanoFab Featured in Regional Tech Videos ===
The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry.
We now have Ruthenium (Ru) and Platinum (Pt) metal depositions developed on the [[Atomic_Layer_Deposition_(Oxford_FlexAL)|Oxford FlexAL ALD]] tool. See the [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition: Recipes]] page or contact [[Bill_Mitchell|Bill Mitchell]] for more information.
// [[User:John d|Posted:]] 16:07, 01 June 2017 (PST)


See the videos here:
=== New Deep Silicon Etcher Online ===
{| class="wikitable"
A new [[DSEIII_(PlasmaTherm/Deep_Silicon_Etcher)|Plasma-Therm Versaline DSE III DRIE etcher]] has been qualified for bosch etch and single-step etches, and is available for use. The new tool features much higher silicon etch rates, improved uniformity, and allows for photoresist up to the edges of the wafer. An Intellemetrics LEP500 laser end point monitor has also been installed on the system.
|[https://fast.wistia.net/embed/iframe/l46hsnwg4b?controlsVisibleOnLoad=true&muted=0&playerColor&copyLinkAndThumbnailEnabled=false '''''Santa Barbara County: This is TechTopia'''''] [[File:Techtopia_Vid_-_Thumbnail_PlayButton.jpg|none|300x300px|link=https://fast.wistia.net/embed/iframe/l46hsnwg4b?controlsVisibleOnLoad=true&muted=0&playerColor&copyLinkAndThumbnailEnabled=false]]
// [[User:John d|Posted:]] 22:16, 27 November 2017 (PST)


|[https://www.youtube.com/watch?v=op746os6eRI '''''UCSB NanoFab: An Innovation Center'''''] [[File:NanoFab_COE_Engineering_Vid_-_thumbnail_2_crop.jpg|none|300x300px|link=https://www.youtube.com/watch?v=op746os6eRI]]
=== 2016 Survey Results ===
|}
See the May 2016 {{file|Survey052016.pdf| User Survey Results}}.
// [[User:Thibeault|Posted:]] 12:00, 01 May 2016 (PST)


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// [[User:John d|John d]] 09:26, 1 November 2023 (PST)
=== CAIBE Ion Mill Available ===
The [[CAIBE (Oxford Ion Mill)]] is up and running! Contact [[Brian Lingg]] for more information.
// [[User:Thibeault|Posted:]] 12:00, 01 July 2015 (PST)

=== NanoFiles SFTP Online ===
Files generated with Nanofab tools (SEM images, AFM profiles, etc.) are now available on the nanofab SFTP server. Please check [http://signupmonkey.ece.ucsb.edu SignupMonkey] for details.
// [[User:Thibeault|Posted:]] 12:00, 07 July 2013 (PST)


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Latest revision as of 00:52, 3 October 2024

News from the U.C. Santa Barbara Nanofabrication Facility.

DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies

CA DREAMS Hub is awarded $31.9 million in funding under the Microelectronics Commons -

  • $16.2 Million to develop advanced gallium nitride (GaN) semiconductor technologies, with partners including USC, Northrop Grumman, Teledyne Technologies, HRL Laboratories, PseudolithIC, Monde Wireless Inc., Transphorm, UCLA and UC Santa Barbara.
  • $15.7 Million in Funding for 5G/6G millimeter-wave Phased-Array Prototypes, with team USC, Northrop Grumman, HRL Laboratories, Teledyne, Caltech, UCLA, UC Santa Barbara, UC San Diego, Vorago, Global Foundries.

// Demis D. John 16:32, 23 September 2024 (PDT)

NSF-ATE Award for SBCC and UCSB: New Semiconductor Pathway

The UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build a semiconductor pathway (associates degree or certificate) at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education" is one of 6 projects funded by an Intel-NSF partnership. The project builds on the existing "Cleanroom Bootcamps" already being run twice a year in the CNSI QSF cleanroom. // Demis D. John 13:15, 14 August 2024 (PDT)

CHIPS Act Award Announced to USC and UCSB NanoFab

U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. -- Demis 12:06, 4 October 2023 (PDT)

RIE#3 Removed

We have removed RIE#3 from the Nanofab, it has gone to the Teaching Cleanroom. All user's processes have been transferred to the Fluorine ICP Etcher. // Demis D. John 15:58, 6 August 2024 (PDT)

NanoFab staff awarded Goleta's Innovator of the Year 2023

NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. // Demis D. John 13:58, 7 November 2023 (PST)

NanoFab Featured in Regional Tech Videos

The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry.

See the videos here:

Santa Barbara County: This is TechTopia
Techtopia Vid - Thumbnail PlayButton.jpg
 UCSB NanoFab: An Innovation Center
NanoFab COE Engineering Vid - thumbnail 2 crop.jpg

// John d 09:26, 1 November 2023 (PST)

See older articles at this link

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