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===DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies===
=== Wide FOV Microscope Installed ===
[https://viterbischool.usc.edu/news/2024/09/usc-viterbi-led-ca-dreams-hub-is-awarded-31-9-million-in-funding-under-the-microelectronics-commons/ CA DREAMS Hub is awarded $31.9 million in funding under the Microelectronics Commons] -
We have installed an AmScope stereo microscope in Bay 4 for wide field-of-view digital imaging/capture, with >2cm of FOV currently available. Wiki page here: [[Microscopes#Microscope_.238:_AmScope_Wide_Field_of_View_Stereoscope_.28Bay_4.29|AmScope Wide Field of View Stereoscope]]
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// [[User:John d|John d]] 14:52, 19 April 2023 (PDT)


* $16.2 Million to develop advanced gallium nitride (GaN) semiconductor technologies, with partners including USC, Northrop Grumman, Teledyne Technologies, HRL Laboratories, PseudolithIC, Monde Wireless Inc., Transphorm, UCLA and UC Santa Barbara.
=== Loomis Scribe & Break installed ===
* $15.7 Million in Funding for 5G/6G millimeter-wave Phased-Array Prototypes, with team USC, Northrop Grumman, HRL Laboratories, Teledyne, Caltech, UCLA, UC Santa Barbara, UC San Diego, Vorago, Global Foundries.
We have installed a new [https://loomisinc.com/lsd-155lt/ Loomis LSD-155LT] Automated Scribe & Break Cleaving tool in the Back-End Processing lab. Qualifications are underway. Contact [[Aidan_Hopkins|supervisor, Aidan Hopkins]], for more information.
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// [[User:John d|John d]] 09:41, 16 April 2023 (PDT)


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// [[User:John_d|Demis D. John]] 16:32, 23 September 2024 (PDT)
=== JEOL SEM Installed ===
SEM #1 has been replaced with a new JEOL SEM, which is currently being installed and qualified. Contact the [[Aidan_Hopkins|supervisor, Aidan Hopkins]], for more information.
// [[User:John d|John d]] 09:00, 11 April 2023 (PDT)


===NSF-ATE Award for SBCC and UCSB: New Semiconductor Pathway===
=== Dektak XT installed ===
The UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build a semiconductor pathway (associates degree or certificate) at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "[https://www.nsf.gov/awardsearch/showAward?AWD_ID=2400982 Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education]" is one of 6 projects funded by an [https://new.nsf.gov/news/nsf-invests-76m-educational-projects-build-skilled Intel-NSF partnership.] The project builds on the existing "[https://nanofab.ucsb.edu/workforce#bootcamps Cleanroom Bootcamps]" already being run twice a year in the [https://www.cnsi.ucsb.edu/facilities/quantum-structures CNSI QSF cleanroom]. // [[User:John_d|Demis D. John]] 13:15, 14 August 2024 (PDT)
We have replaced the old Dektak 6M with a new Dektak XT profilometer. This tool will provide robust, fast metrology for rapid in-process topography inspection.
// [[User:John d|John d]] 10:41, 25 January 2023 (PST)


===CHIPS Act Award Announced to USC and UCSB NanoFab===
=== New Process Control data tables ===
[https://carbajal.house.gov/news/documentsingle.aspx?DocumentID=1672 U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab] on receiving a [https://www.nist.gov/chips CHIPS & Science Act] award, as part of the [https://microelectronicscommons.org/ California DREAMS Hub (Microelectronics Commons) led by USC].
We have added [[Process_Group_-_Process_Control_Data|"Process Control Data"]] - data on deposition/etch repeatability - to a number of our highest used etchers and deposition tools. The datasheets are linked in multiple places, mainly on the Recipes pages for each tool, or on the general Recipes pages for [[Vacuum_Deposition_Recipes|'''Deposition Recipes''']] or [[Dry_Etching_Recipes|'''Etch Recipes''']].
// [[User:John d|John d]] 16:07, 5 January 2023 (PST)
-- [[User:John d|Demis]] 12:06, 4 October 2023 (PDT)


=== RIE#3 Removed ===
=== Oxford PlasmaPro ICP Etcher installed ===
We have removed [[RIE_3_(MRC)|RIE#3]] from the Nanofab, it has gone to the [https://www.ece.ucsb.edu/department-resources/electronics-shop/tcr Teaching Cleanroom]. All user's processes have been transferred to the [[Fluorine_ICP_Etcher_(PlasmaTherm/SLR_Fluorine_ICP)|Fluorine ICP Etcher]]. // [[User:John_d|Demis D. John]] 15:58, 6 August 2024 (PDT)
We have a new ICP etcher in Bay 2:
[[Oxford_ICP_Etcher_(PlasmaPro_100_Cobra)]]


=== NanoFab staff awarded Goleta's Innovator of the Year 2023 ===
The tool has been qualified for InP Ridge and InGaAsP Grating etches, and is intended for III-V etching in general (GaAs, GaN, GaSb etc.)
NanoFab staff member [[Demis D. John]] has been awarded the ''City of Goleta's "Innovator of the Year"'' for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the [https://sbscchamber.com/goletas-finest-2023-award-recipients-announced/ full announcement by the Santa Barbara South Coast Chamber of Commerce]. // [[User:John d|Demis D. John]] 13:58, 7 November 2023 (PST)


=== NanoFab Featured in Regional Tech Videos ===
In addition, the tool is capable of Atomic Layer Etching on various materials. Contact [[Tony_Bosch | the supervisor]] for training.
The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry.
// [[User:John d|John d]] 11:27, 29 September 2021 (PDT)


See the videos here:
=== SiO2 etching, High-Aspect Ratio ===
{| class="wikitable"
[[Bill_Mitchell|Dr. Bill Mitchell]] recently published an article detailing [[Template:Publications#Highly_Selective_and_Vertical_Etch_of_Silicon_Dioxide_using_Ruthenium_Films_as_an_Etch_Mask|'''high-aspect ratio SiO2 etching (JVST-A, May 2021)''']] in the [[ICP_Etching_Recipes#PlasmaTherm.2FSLR_Fluorine_Etcher|Plasma-Therm Fluorine ICP etcher]], using a novel Ruthenium Hard Mask.
|[https://fast.wistia.net/embed/iframe/l46hsnwg4b?controlsVisibleOnLoad=true&muted=0&playerColor&copyLinkAndThumbnailEnabled=false '''''Santa Barbara County: This is TechTopia'''''] [[File:Techtopia_Vid_-_Thumbnail_PlayButton.jpg|none|300x300px|link=https://fast.wistia.net/embed/iframe/l46hsnwg4b?controlsVisibleOnLoad=true&muted=0&playerColor&copyLinkAndThumbnailEnabled=false]]


|[https://www.youtube.com/watch?v=op746os6eRI '''''UCSB NanoFab: An Innovation Center'''''] [[File:NanoFab_COE_Engineering_Vid_-_thumbnail_2_crop.jpg|none|300x300px|link=https://www.youtube.com/watch?v=op746os6eRI]]
Ruthenium can be deposited using the [[Atomic_Layer_Deposition_Recipes#Ru_deposition_.28ALD_CHAMBER_1.29|Oxford ALD]] or [[Sputtering_Recipes#Ru_Deposition_.28Sputter_4.29|AJA Sputter]] and etched in one of the [[ICP_Etching_Recipes#Ru_.28Ruthenium.29_Etch_.28Panasonic_2.29|Panasonic ICP's]].
|}


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// [[User:John d|John d]] 09:26, 1 November 2023 (PST)
You can find a full process flow at the [[ICP_Etching_Recipes#SiO2_Etching_.28Fluorine_ICP_Etcher.29|FL-ICP's Recipe Page]], in this case using a Sputtered Ru hard mask and I-line stepper lithography.
// [[User:John d|John d]] 08:05, 27 May 2021 (PDT)

=== Wafer Polisher available ===
We have added an [https://wiki.nanotech.ucsb.edu/wiki/Mechanical_Polisher_(Allied) Allied Wafer Polish] tool to our equipment list. Contact [[Bill_Millerski]] for more information. // [[User:John d|John d]] 16:49, 10 May 2021 (PDT)

=== Digital Microscope: Olympus DSX-1000 ===
You'll see a new digital microscope in Bay 4/Metrology, that's our new [https://www.olympus-ims.com/en/microscope/dsx1000/high-resolution-model/ Olympus DSX-1000]. We are currently developing procedures, keep an eye out for training emails.
// [[User:John d|John d]] 13:49, 8 April 2021 (PDT)

=== Raith Velion: FIB/SEM Installation ===
We have installed a new state-of-the-art focused ion beam/electron beam tool in Bay 1.
The Raith Velion enables synchronized interferometric stage, Focused-ion Beam Lithography with ~10nm features or less, live SEM during writing, and Electron-Beam Lithography.

Learn more about the tool's capabilities at the Raith website:
* [https://www.raith.com/products/velion.html?mobile=0 Raith Products: Velion].
* [https://www.youtube.com/watch?v=rW5w6nMhwfQ VIDEO: Synchronized FIB beam + Laser Interferometric Stage write, with live SEM]

Tool qualification is currently underway.
[[Dan Read|Dr. Dan Read]] is the resident expert on this new tool.

// [[User:John d|John d]] 06:53, 30 November 2020 (PST)


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Latest revision as of 00:52, 3 October 2024

News from the U.C. Santa Barbara Nanofabrication Facility.

DREAMS Hub awarded 2 projects in GaN and 5G/6G technologies

CA DREAMS Hub is awarded $31.9 million in funding under the Microelectronics Commons -

  • $16.2 Million to develop advanced gallium nitride (GaN) semiconductor technologies, with partners including USC, Northrop Grumman, Teledyne Technologies, HRL Laboratories, PseudolithIC, Monde Wireless Inc., Transphorm, UCLA and UC Santa Barbara.
  • $15.7 Million in Funding for 5G/6G millimeter-wave Phased-Array Prototypes, with team USC, Northrop Grumman, HRL Laboratories, Teledyne, Caltech, UCLA, UC Santa Barbara, UC San Diego, Vorago, Global Foundries.

// Demis D. John 16:32, 23 September 2024 (PDT)

NSF-ATE Award for SBCC and UCSB: New Semiconductor Pathway

The UCSB NanoFab and CNSI were recently awarded a project by NSF-ATE to build a semiconductor pathway (associates degree or certificate) at Santa Barbara City College, utilizing UCSB Cleanrooms. The project "Expansion of CCPRIME: Central Coast Partnership for Regional Industry-Focused Micro/Nanotechnology Education" is one of 6 projects funded by an Intel-NSF partnership. The project builds on the existing "Cleanroom Bootcamps" already being run twice a year in the CNSI QSF cleanroom. // Demis D. John 13:15, 14 August 2024 (PDT)

CHIPS Act Award Announced to USC and UCSB NanoFab

U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. -- Demis 12:06, 4 October 2023 (PDT)

RIE#3 Removed

We have removed RIE#3 from the Nanofab, it has gone to the Teaching Cleanroom. All user's processes have been transferred to the Fluorine ICP Etcher. // Demis D. John 15:58, 6 August 2024 (PDT)

NanoFab staff awarded Goleta's Innovator of the Year 2023

NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. // Demis D. John 13:58, 7 November 2023 (PST)

NanoFab Featured in Regional Tech Videos

The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry.

See the videos here:

Santa Barbara County: This is TechTopia
Techtopia Vid - Thumbnail PlayButton.jpg
 UCSB NanoFab: An Innovation Center
NanoFab COE Engineering Vid - thumbnail 2 crop.jpg

// John d 09:26, 1 November 2023 (PST)

See older articles at this link

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