Difference between revisions of "Template:Announcements"
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| − | =====Unaxis ICP-PECVD is DOWN===== |
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| − | RF1 continues to be a problem. I will start the process of elimination from a hardware point of view Monday. Once I resolve the hardware issue our Process group will be exclusively running the system for about a week. During this time we will NOT be allowing anyone else to use the system. Sorry for the inconvenience. |
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| − | ===== |
+ | =====Stepper #3 (ASML DUV) - Tool down===== |
| + | Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand. |
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| − | The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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| + | Unfortunately, we cannot initialize the stage at this time. System is down. // [[User:Mehalana v|Vraj Mehalana]] 18:36, 3 October 2024 (PDT) |
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| − | =====Dicing Saw (ADT) Upgrade 10/9===== |
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| − | The dicing saw is scheduled go down for an upgrade on Monday October 9th and will be down for that week and into the weekend. Part of the upgrade will be updated software and will require users to be re-trained. I will provide more info on the re-training once I get a little hands on time with the updated software. |
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| − | I'll send out a couple of reminder emails between now and then and keep everyone updated in the event the schedule for this changes. |
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| − | ===== |
+ | =====MLA Service Complete===== |
| + | The FSE has completed their work. |
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| − | The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 10:29, 26 September 2023 (PDT) |
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| + | I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good. |
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| − | =====Stepper #2 (GCA Autostep 200) - Scheduled Maintenance===== |
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| + | |||
| − | The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: |
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| + | Tool is available to use. |
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| − | (1) 09-30-23 8:00am-5:00pm |
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| + | |||
| − | (2) 10-01-23 8:00am-5:00pm |
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| + | -Lee // [[User:John_d|Demis D. John]] 17:46, 2 October 2024 (PDT) |
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| − | (3) 10-02-23 8:00am-12:00pm |
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| + | |||
| − | Please plan your work activities accordingly. |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT) |
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| + | When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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| + | |||
| + | -Aidan |
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| ⚫ | |||
| + | |||
| + | =====ICP1 Down===== |
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| + | The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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| ⚫ | |||
| + | |||
| + | =====Lab Access Changes: Symmetry App===== |
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| + | The iris scanner has been decommissioned. Please use the card reader which supports: |
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| + | |||
| + | -Physical card |
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| + | |||
| + | -Mobile phone via Symmetry App |
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| + | |||
| ⚫ | |||
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| − | We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next week and will update everyone at that time. -Lee |
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| − | //[[User:Mehalana v|Vraj Mehalana]] 10:51, 29 September 2023 (PDT) |
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Latest revision as of 18:36, 3 October 2024
Stepper #3 (ASML DUV) - Tool down
Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand.
Unfortunately, we cannot initialize the stage at this time. System is down. // Vraj Mehalana 18:36, 3 October 2024 (PDT)
MLA Service Complete
The FSE has completed their work.
I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good.
Tool is available to use.
-Lee // Demis D. John 17:46, 2 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)