Template:Announcements: Difference between revisions
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=====ProbeStation scheduled IT maintenance===== |
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The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates : |
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* 10-30-23 |
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* 10-31-23 |
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Please plan your work activities accordingly. |
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=====Stepper #3 (ASML DUV) - Tool down===== |
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Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand. |
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PECVD2 will be going down on Thursday October 19th for replacement of the hoist. |
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This will be an all day event starting at 8:00am. |
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Please plan accordingly. |
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This was originally planned for 10-2, but we had to reschedule due to other equipment down |
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//[[User:Mehalana v|Vraj Mehalana]] |
Unfortunately, we cannot initialize the stage at this time. System is down. // [[User:Mehalana v|Vraj Mehalana]] 18:36, 3 October 2024 (PDT) |
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=====Raith Velion - Tool Up===== |
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The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am. |
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=====MLA Service Complete===== |
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- Dan |
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The FSE has completed their work. |
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I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good. |
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=====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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Please plan your process accordingly. |
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Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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Tool is available to use. |
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-Lee // [[User:John_d|Demis D. John]] 17:46, 2 October 2024 (PDT) |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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-Aidan |
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===== Dicing Saw Upgrade - Update===== |
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The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. |
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-Lee |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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EVG finally has our PO. They are scheduled to be here next week, my guess would be Tuesday. |
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-Mobile phone via Symmetry App |
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-Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 10:37, 18 October 2023 (PDT) |
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Revision as of 01:36, 4 October 2024
Stepper #3 (ASML DUV) - Tool down
Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand.
Unfortunately, we cannot initialize the stage at this time. System is down. // Vraj Mehalana 18:36, 3 October 2024 (PDT)
MLA Service Complete
The FSE has completed their work.
I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good.
Tool is available to use.
-Lee // Demis D. John 17:46, 2 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)