Template:Announcements: Difference between revisions
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=====Stepper #3 (ASML DUV) - Tool down===== |
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Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand. |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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Unfortunately, we cannot initialize the stage at this time. System is down. // [[User:Mehalana v|Vraj Mehalana]] 18:36, 3 October 2024 (PDT) |
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Test run completed without issue. System is ready to use, EXCEPT for heater - contact supervisor for heater use. See email for updates to operating procedure. |
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=====MLA Service Complete===== |
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The FSE has completed their work. |
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=====ProbeStation scheduled IT maintenance===== |
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The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates : |
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* 10-30-23 |
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* 10-31-23 |
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* 11-01-23 |
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* 11-02-23 |
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Please plan your work activities accordingly. |
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I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good. |
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Tool is available to use. |
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We were able to fix the vacuum leak but unfortunately the particulates are off the chart and rate is still a bit low. Tomorrow morning we will be taking the showerhead apart and cleaning it up before testing again. |
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//[[User:Mehalana v|Vraj Mehalana]] 16:48, 31 October 2023 (PDT) |
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=====Unaxis VLR - GapFill allowed Mon 30th 5pm to Wed 6am===== |
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We are still working on an improved GapFill recipe. |
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To allow your processes through, on Monday EVENING at 5pm we will allow the old "450W GapFill" recipe to be run, |
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- starting Monday Oct 30th, evening at 5pm, |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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-Aidan |
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- ending Wed Nov 1st, morning at 6am. |
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Reminder: You may NOT run the 450W recipe outside these allowed times, and you may Not modify our recipes apart from Dep/Clean TIME. |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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=====Lab Access Changes: Symmetry App===== |
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Let me know if you have any questions. |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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-Mobile phone via Symmetry App |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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//[[User:Mehalana v|Vraj Mehalana]] |
//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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=====EVG Activation: Up===== |
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The FSE has completed the work on the tool and I have made several test runs without issue. |
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IMPORTANT - Please see corresponding email for changes in operation. |
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//[[User:Mehalana v|Vraj Mehalana]] 15:58, 24 October 2023 (PDT) |
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Revision as of 01:36, 4 October 2024
Stepper #3 (ASML DUV) - Tool down
Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand.
Unfortunately, we cannot initialize the stage at this time. System is down. // Vraj Mehalana 18:36, 3 October 2024 (PDT)
MLA Service Complete
The FSE has completed their work.
I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good.
Tool is available to use.
-Lee // Demis D. John 17:46, 2 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)