Template:Announcements: Difference between revisions
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The tool will be undergoing maintenance and be unavailable the following dates and times: |
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1-18-24 at 8:00am to 1-18-24 at 6:00pm |
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Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand. |
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Unfortunately, we cannot initialize the stage at this time. System is down. // [[User:Mehalana v|Vraj Mehalana]] 18:36, 3 October 2024 (PDT) |
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Please plan your processing activities accordingly. |
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=====MLA Service Complete===== |
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Bill Millerski |
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The FSE has completed their work. |
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I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good. |
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Tool is available to use. |
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===== Stepper #2 (GCA Autostep 200) - Scheduled Maintenance===== |
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The tool will be undergoing maintenance and be unavailable the following dates and times: |
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1-15-24 at 8:00am to 1-17-24 at 6:00pm |
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Please plan your processing activities accordingly. |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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-Aidan |
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//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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I am fairly certain the heater controller has failed. I have spoken with the vendor and they are looking into it, but we will most likely have to send the unit in. I will push to have a replacement controller sent instead, but since this is a warranty repair they will probably want to eval it in-house. I would plan for it to be down for at least a couple of weeks. I'll send out an update once I have more info. |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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=====DUV is down - Update===== |
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contacted our vendor for an update and was told that the parts should ship by this Friday. If all goes well the tool should be up mid next week. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:07, 13 December 2023 (PST) |
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=====PECVD2 Planned Down Time for Maintenance 12-11-23===== |
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PECVD2 will be going down on Monday 12-11-23 at 10:00am for replacement of the RF connector and RF Electrode. |
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When the work is complete, the process group will be running tests for the remainder of the afternoon. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:07, 13 December 2023 (PST) |
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=====Year End Shutdown===== |
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We will be shutting down lab operations Tuesday Dec 26th at 9 am for year end maintenance activities. The current plan is to be back open for operations Thursday Dec 28th at 2 pm. |
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The staff will be on Holiday Dec 25th & 26th, and January 1st & 2nd. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:39, 16 November 2023 (PST) |
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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-Mobile phone via Symmetry App |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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SUSS now aims to be on site in early February. I’ll will send out an email once I get confirmation for a specific date. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:23, 13 December 2023 (PST) |
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Revision as of 01:36, 4 October 2024
Stepper #3 (ASML DUV) - Tool down
Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand.
Unfortunately, we cannot initialize the stage at this time. System is down. // Vraj Mehalana 18:36, 3 October 2024 (PDT)
MLA Service Complete
The FSE has completed their work.
I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good.
Tool is available to use.
-Lee // Demis D. John 17:46, 2 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)