Template:Announcements: Difference between revisions
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=====FEI SEM#2 Replacement Project===== |
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The FEI SEM will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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=====Stepper #3 (ASML DUV) - Tool UP===== |
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I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
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<!------------- Equipment Status ----------------> |
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Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
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===== E-Beam #5: Down ===== |
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Chuck rotation motor damaged. |
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Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
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===== ICP #1: Down ===== |
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One of the dry pumps is not getting power from the tool. We have located part of the problem but need to contact Panasonic for some guidance. Since tech support is in Japan, response time will be impacted. -- Lee Sawyer |
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// [[User:Mehalana v|Vraj Mehalana]] 12:36, 13 March 2023 (PDT) |
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=====Suss SB6-8E===== |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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// [[User:John d|John d]] 09:35, 13 February 2023 (PST) |
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-Aidan |
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===== Dektak XT ready for training ===== |
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We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please [[Aidan_Hopkins|contact the tool supervisor]]. |
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// [[User:John d|John d]] 10:08, 7 February 2023 (PST) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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-Mobile phone via Symmetry App |
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Latest revision as of 13:21, 22 October 2024
Stepper #3 (ASML DUV) - Tool UP
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)