Template:Announcements: Difference between revisions
Mehalana v (talk | contribs) (Feed Appended) |
No edit summary |
||
| (231 intermediate revisions by 7 users not shown) | |||
| Line 1: | Line 1: | ||
<startfeed /> |
<startfeed /> |
||
None |
|||
===== |
=====Stepper #3 (ASML DUV) - Tool UP===== |
||
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
|||
We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. |
|||
| ⚫ | |||
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
|||
=====Wafer Coater (S Cubed Flexi) - S3 field service===== |
|||
S3 will be on-site looking into our hand 2 issues on Wednesday May 3rd and 4th. They will be confirming Monday so there is a chance those days get shifted. Please plan your processing accordingly as the system will not be available while they are here looking into the problem. |
|||
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
|||
| ⚫ | |||
=====FEI SEM#1 Replacement Project===== |
|||
=====Suss SB6-8E===== |
|||
The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
|||
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
|||
| ⚫ | |||
<!--feedBurner name="UCSBNanofab-Announcements" /--> |
|||
-Aidan |
|||
<!-- Description of the RSS feed --> |
|||
| ⚫ | |||
| ⚫ | |||
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
|||
| ⚫ | |||
=====Lab Access Changes: Symmetry App===== |
|||
The iris scanner has been decommissioned. Please use the card reader which supports: |
|||
-Physical card |
|||
-Mobile phone via Symmetry App |
|||
| ⚫ | |||
<!-- |
<!-- |
||
SEE THE BOTTOM OF THIS PAGE FOR DETAILED INSTRUCTIONS ON ADDING NEWS ITEMS. |
SEE THE BOTTOM OF THIS PAGE FOR DETAILED INSTRUCTIONS ON ADDING NEWS ITEMS. |
||
| Line 18: | Line 33: | ||
>> Use two slashes // and FOUR tilde's to insert your signature at the end of your post: //~~~~ |
>> Use two slashes // and FOUR tilde's to insert your signature at the end of your post: //~~~~ |
||
--> |
--> |
||
<!----------------------------------------------> |
|||
<!------------- Equipment Status ----------------> |
|||
| ⚫ | |||
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
|||
// [[User:John d|John d]] 09:35, 13 February 2023 (PST) |
|||
===== Au Plating: UP===== |
|||
only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
|||
// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT) |
|||
<!---------- end of Equipment Status ------------> |
|||
<!---------DO NOT EDIT BELOW THIS LINE-----------> |
<!---------DO NOT EDIT BELOW THIS LINE-----------> |
||
<endfeed /> |
<endfeed /> |
||
Latest revision as of 13:21, 22 October 2024
Stepper #3 (ASML DUV) - Tool UP
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)