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=====Unaxis ICP-PECVD is DOWN===== |
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RF1 continues to be a problem. I will start the process of elimination from a hardware point of view Monday. Once I resolve the hardware issue our Process group will be exclusively running the system for about a week. During this time we will NOT be allowing anyone else to use the system. Sorry for the inconvenience. |
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=====Stepper #3 (ASML DUV) - Tool UP===== |
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I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
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=====Dicing Saw (ADT) Upgrade 10/9===== |
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The dicing saw is scheduled go down for an upgrade on Monday October 9th and will be down for that week and into the weekend. Part of the upgrade will be updated software and will require users to be re-trained. I will provide more info on the re-training once I get a little hands on time with the updated software. |
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I'll send out a couple of reminder emails between now and then and keep everyone updated in the event the schedule for this changes. |
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Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
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=====Stepper #1 (GCA 6300) Scheduled Maintenance===== |
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The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:29, 26 September 2023 (PDT) |
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=====Stepper #2 (GCA Autostep 200) - Scheduled Maintenance===== |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: |
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(1) 09-30-23 8:00am-5:00pm |
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(2) 10-01-23 8:00am-5:00pm |
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(3) 10-02-23 8:00am-12:00pm |
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Please plan your work activities accordingly. |
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//[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT) |
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-Aidan |
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I went to check the tool out this morning and found it was not pumping down properly. After further inspection of the tool I found that the lid's quartz liner has cracked. Contacting EVG but the tool will probably be down for some time. I will updated everyone once I have an estimated down time. |
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//[[User:Mehalana v|Vraj Mehalana]] 11:39, 25 September 2023 (PDT) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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-Mobile phone via Symmetry App |
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Latest revision as of 13:21, 22 October 2024
Stepper #3 (ASML DUV) - Tool UP
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)