Template:Announcements: Difference between revisions
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=====PECVD2 Planned Down Time for Maintenance 10-19-23===== |
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PECVD2 will be going down on Thursday October 19th for replacement of the hoist. |
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This will be an all day event starting at 8:00am. |
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Please plan accordingly. |
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This was originally planned for 10-2, but we had to reschedule due to other equipment down |
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I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
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The y-axis motor has been replaced and the stage is working well now. Tests overnight have been completed with excellent results. I'll check the source and column alignment this morning, the tool will be available from 10am. |
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Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
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- Dan |
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Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
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=====Unaxis ICP-PECVD is UP for Non-GapFill===== |
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Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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Please plan your process accordingly. |
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Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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-Aidan |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule. |
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-Physical card |
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-Lee |
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-Mobile phone via Symmetry App |
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//[[User:Mehalana v|Vraj Mehalana]] 13:25, 3 October 2023 (PDT) |
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=====Stepper #1 (GCA 6300) Scheduled Maintenance===== |
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The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. |
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//[[User:Mehalana v|Vraj Mehalana]] |
//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT) |
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=====Stepper #2 (GCA Autostep 200) - Scheduled Maintenance===== |
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The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: |
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(1) 09-30-23 8:00am-5:00pm |
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(2) 10-01-23 8:00am-5:00pm |
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(3) 10-02-23 8:00am-12:00pm |
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Please plan your work activities accordingly. |
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//[[User:Mehalana v|Vraj Mehalana]] 13:49, 27 September 2023 (PDT) |
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We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next week and will update everyone at that time. -Lee |
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//[[User:Mehalana v|Vraj Mehalana]] 10:51, 29 September 2023 (PDT) |
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Latest revision as of 13:21, 22 October 2024
Stepper #3 (ASML DUV) - Tool UP
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)