Template:Announcements: Difference between revisions
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=====Stepper #3 (ASML DUV) - Tool UP===== |
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I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
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Test run completed without issue. System is ready to use, EXCEPT for heater - contact supervisor for heater use. See email for updates to operating procedure. |
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Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
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=====ProbeStation scheduled IT maintenance===== |
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The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates : |
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* 10-30-23 |
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* 10-31-23 |
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Please plan your work activities accordingly. |
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Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
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=====Suss SB6-8E===== |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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Initially it was planned to remove the hoist again to rebuild it to solve the leak. |
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-Aidan |
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The manufacturer is sending out a rebuild kit under warranty since it is a brand new hoist that is leaking. |
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When that arrives I will schedule another all day event to rebuild the hoist. |
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=====ICP1 Down===== |
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I cleaned up the leaked oil, checked oil level, and did an inspection of the tool. |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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System is back up and available for use. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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=====Unaxis VLR - GapFill allowed Mon 30th 5pm to Wed 6am===== |
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We are still working on an improved GapFill recipe. |
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-Physical card |
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To allow your processes through, on Monday EVENING at 5pm we will allow the old "450W GapFill" recipe to be run, |
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-Mobile phone via Symmetry App |
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- starting Monday Oct 30th, evening at 5pm, |
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- ending Wed Nov 1st, morning at 6am. |
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Reminder: You may NOT run the 450W recipe outside these allowed times, and you may Not modify our recipes apart from Dep/Clean TIME. |
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Let me know if you have any questions. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
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=====EVG Activation: Up===== |
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The FSE has completed the work on the tool and I have made several test runs without issue. |
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IMPORTANT - Please see corresponding email for changes in operation. |
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//[[User:Mehalana v|Vraj Mehalana]] 15:58, 24 October 2023 (PDT) |
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Latest revision as of 13:21, 22 October 2024
Stepper #3 (ASML DUV) - Tool UP
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)