Template:Announcements: Difference between revisions
Mehalana v (talk | contribs) No edit summary |
No edit summary |
||
| (160 intermediate revisions by 5 users not shown) | |||
| Line 1: | Line 1: | ||
<startfeed /> |
<startfeed /> |
||
===== |
=====Stepper #3 (ASML DUV) - Tool UP===== |
||
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
|||
The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
|||
| ⚫ | |||
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
|||
| ⚫ | |||
Test run completed without issue. System is ready to use, EXCEPT for heater - contact supervisor for heater use. See email for updates to operating procedure. |
|||
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
|||
| ⚫ | |||
=====ProbeStation scheduled IT maintenance===== |
|||
The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates : |
|||
* 10-30-23 |
|||
* 10-31-23 |
|||
* 11-01-23 |
|||
* 11-02-23 |
|||
Please plan your work activities accordingly. |
|||
| ⚫ | |||
| ⚫ | |||
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
|||
-Aidan |
|||
=====PECVD2 is UP===== |
|||
| ⚫ | |||
We were able to fix the vacuum leak but unfortunately the particulates are off the chart and rate is still a bit low. Tomorrow morning we will be taking the showerhead apart and cleaning it up before testing again. |
|||
//[[User:Mehalana v|Vraj Mehalana]] 16:48, 31 October 2023 (PDT) |
|||
=====Unaxis VLR - GapFill allowed Mon 30th 5pm to Wed 6am===== |
|||
We are still working on an improved GapFill recipe. |
|||
| ⚫ | |||
To allow your processes through, on Monday EVENING at 5pm we will allow the old "450W GapFill" recipe to be run, |
|||
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
|||
| ⚫ | |||
=====Lab Access Changes: Symmetry App===== |
|||
- starting Monday Oct 30th, evening at 5pm, |
|||
The iris scanner has been decommissioned. Please use the card reader which supports: |
|||
-Physical card |
|||
- ending Wed Nov 1st, morning at 6am. |
|||
-Mobile phone via Symmetry App |
|||
Reminder: You may NOT run the 450W recipe outside these allowed times, and you may Not modify our recipes apart from Dep/Clean TIME. |
|||
| ⚫ | |||
Let me know if you have any questions. |
|||
//[[User:Mehalana v|Vraj Mehalana]] 09:55, 11 October 2023 (PDT) |
|||
| ⚫ | |||
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
|||
//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
|||
=====EVG Activation: Up===== |
|||
The FSE has completed the work on the tool and I have made several test runs without issue. |
|||
IMPORTANT - Please see corresponding email for changes in operation. |
|||
//[[User:Mehalana v|Vraj Mehalana]] 15:58, 24 October 2023 (PDT) |
|||
<!-- |
<!-- |
||
SEE THE BOTTOM OF THIS PAGE FOR DETAILED INSTRUCTIONS ON ADDING NEWS ITEMS. |
SEE THE BOTTOM OF THIS PAGE FOR DETAILED INSTRUCTIONS ON ADDING NEWS ITEMS. |
||
| Line 54: | Line 33: | ||
>> Use two slashes // and FOUR tilde's to insert your signature at the end of your post: //~~~~ |
>> Use two slashes // and FOUR tilde's to insert your signature at the end of your post: //~~~~ |
||
--> |
--> |
||
<!----------------------------------------------> |
|||
<!------------- Equipment Status ----------------> |
|||
<!---------- end of Equipment Status ------------> |
|||
<!---------DO NOT EDIT BELOW THIS LINE-----------> |
<!---------DO NOT EDIT BELOW THIS LINE-----------> |
||
<endfeed /> |
<endfeed /> |
||
Latest revision as of 13:21, 22 October 2024
Stepper #3 (ASML DUV) - Tool UP
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)