Template:Announcements: Difference between revisions
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=====Job Opening: Process Engineer===== |
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The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the [https://wiki.nanofab.ucsb.edu/wiki/Nanofab_Job_Postings NanoFab Job Openings page] for details. |
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=====Stepper #3 (ASML DUV) - Tool UP===== |
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I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
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Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. '''IMPORTANT''': check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled '''''"Invitation to Access Symmetry App"'''''. |
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// [[User:John d|John d]] 13:49, 7 November 2023 (PST) |
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Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
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=====ProbeStation scheduled IT maintenance===== |
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The probe station is up, only the computer is down. Standard electrical probe measurements are still available, just not automated plotting |
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Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
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Unfortunately PECVD2 is still down. |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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-Aidan |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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-Physical card |
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We replaced the MFC and ran into devicenet issues. |
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I swapped the internal board with the old MFC and the devicenet issues appeared to be resolved. |
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After another test run, there was no change in dep rate. |
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-Mobile phone via Symmetry App |
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We will continue trouble shooting on Monday. |
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=====Wafer Bonder, (Suss SB6-8E)===== |
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The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. |
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//[[User:Mehalana v|Vraj Mehalana]] 09:59, 20 September 2023 (PDT) |
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Latest revision as of 13:21, 22 October 2024
Stepper #3 (ASML DUV) - Tool UP
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)