Template:Announcements: Difference between revisions

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=====ICP #2 Scheduled Maint next Tuesday 2/4=====
=====Fluorine ICP: DOWN=====
Hello All,


The shaft that actuates the isolation valve between the loadlock and the process chamber has broken. I have reached out to Plasmatherm to see if they happen to have a spare but the odds are exceedingly low. We will update you all as we know more, but it will be down through the weekend and into early next week.
ICP#2 will be unavailable a good chunk of the day this coming Tuesday. We will be cleaning the chamber and servicing the throttle valve as we believe it may be the source of the reaction chamber pressure errors (plus it is due for servicing).


Tony
⚫
-Lee
⚫
// [[User:John_d|Demis D. John]] 15:25, 29 March 2025 (UTC)


⚫
=====Lab Open=====
⚫
//[[User:Mehalana v|Vraj Mehalana]] 18:54, 31 January 2025 (UTC)
Hello All,
⚫
=====YES - Scheduled Maint=====


Following the campus-wide power shutoff,
I will be taking the YES down for a PM on Tuesday beginning at 8 am. Since I will be changing out the throttle valve and swapping in our original generator, this could go into Wednesday. Please plan your processing accordingly.
The fab is open but the following equipment still has lingering issues:


# Unaxis ICP-PECVD - Main computer is not coming up
-Lee
# ALD/CAIBE - All chambers down. Bill is still working on it.
# Fluorine Etcher - Will remain down until it can be addressed Monday.
# EB3 - Cryo regen failed, on second regen so should come up later.
# GCA Autostep - Having computer issues.
# The ALD/CABE and EB3 have a more than fair chance of coming back up today.


Bill will have those updates along with the status of the Autostep.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 17:22, 23 January 2025 (UTC)


The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest.
⚫
=====Lab is Open=====


Best,
All suits have been pulled and new suits have been put up. All personal items left behind can be found in the boxes in the lobby.
Tony Bosch
⚫
// [[User:John_d|Demis D. John]] 21:37, 28 March 2025 (UTC)


=====RIE #5 is up=====
Please sign up for your hanger spot.
We found a burnt wire in the system controller. System is ready to use.
⚫
//[[User:Mehalana v|Vraj Mehalana]] 17:51, 26 March 2025 (UTC)


⚫
=====EVG - Scheduled downtime=====
THE LAB IS NOW OPEN FOR BUSINESS
I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.


Please let me know if this does not work for you or if you prefer one week over the other.
Thank you for your patience during shutdown activities.
-- [[Peder Lenvik]]


⚫
-Lee
⚫
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
⚫
//[[User:Mehalana v|Vraj Mehalana]] 17:50, 26 March 2025 (UTC)


=====New Gowns in Jan=====
=====Raith Velion UP=====
Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning.
⚫
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for tool belts you can use.
--Dan
⚫
//[[User:Mehalana v|Vraj Mehalana]] 22:27, 1 April 2025 (UTC)


=====New Gowns: Toolbelts purchases=====
⚫
Two vendors for cleanroom belts we are using, you may request others:
⚫
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

⚫
Two vendors for cleanroom belts we are using are listed here, you may request others:
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.terrauniversal.com/tool-belt-pocket-49in-waist-white-altessa-grid-uniform-technology-4954-60a.html Uniform Technology Tool Belt] - note the waist size, the 49” belt fits up to ~36-38” waist.
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]
* [https://www.fishersci.com/shop/products/cleanroom-fannypack-1-ea-white/NC0723118?searchHijack=true&searchTerm=cleanroom-fannypack-1-ea-white&searchType=Rapid&matchedCatNo=NC0723118 HiTEC Fannypack]


// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)
// [[User:John_d|Demis D. John]] 03:34, 3 January 2025 (UTC)

=====KLA P7 Profilometer: Down=====
The KLA remains down awaiting parts. This part order has been expedited to the extent possible and should be here in the next few days.

Thanks
Bill Millerski
⚫
// [[User:John_d|Demis D. John]] 03:30, 3 January 2025 (UTC)

=====Oxford ALD+Ion Mill=====
Unfortunately Chamber 1 is still down for our Oxford Cluster tool. However we did manage a "work around" to get Chamber 2 and Chamber 3 operational again. The software is in constant error state which does not affect processing on Chamber 2 and Chamber 3.
A new tool listing is available in sign up monkey for both these chambers with the word "temporary" or "temp". For the time being users will have to use these "new" tool listings to reserve time on Chamber 2 and Chamber 3. Users will have to go through a quick tutorial with me prior to having access to the tool in order to reserve time slots on sign up monkey. Under NO circumstances are users to use this tool prior to being signed off after being shown how to navigate the software under the current error state.

Just to reiterate:
1) The tool remains locked out in sign up monkey for the previous tool names

2) There is a new tool designation for Chamber 2 & 3 in sign up monkey"Deposition, ALD, Chamber 3 (Oxford FlexAl) Temporary""Dry Etch, Ion Mill (Oxford Flexal) Temp"

3) Users need a quick tutorial from me prior to getting tool access.

4) Users are not to run the tool until being signed off on the new procedure by staff! Any user caught using the tool without having the updated tool tutorial sign off, will be subject to suspension.

5) I will be available at any time during my regular scheduled shift to sign users off. I will be at the tool in the lab for the majority of my work day.
-- Bill Millerski
⚫
//[[User:Mehalana v|Vraj Mehalana]] 23:40, 8 January 2025 (UTC)

=====Holography/PL: HeCd Laser Down Mon Dec 16th=====
The 325nm UV Laser will be unavailable from Mon. Dec 16th, through the christmas shutdown, and will be available again soon after Monday Jan 6th.
We will be installing the refurbished laser which will have higher output power.

Holography will be unavailable during this time, but all other PL lasers will be available.
// [[User:John_d|Demis D. John]] 03:28, 3 January 2025 (UTC)


=====Suss SB6-8E=====
=====Suss SB6-8E=====

Revision as of 22:27, 1 April 2025

Fluorine ICP: DOWN

Hello All,

The shaft that actuates the isolation valve between the loadlock and the process chamber has broken. I have reached out to Plasmatherm to see if they happen to have a spare but the odds are exceedingly low. We will update you all as we know more, but it will be down through the weekend and into early next week.

Tony // Demis D. John 15:25, 29 March 2025 (UTC)

Lab Open

Hello All,

Following the campus-wide power shutoff, The fab is open but the following equipment still has lingering issues:

  1. Unaxis ICP-PECVD - Main computer is not coming up
  2. ALD/CAIBE - All chambers down. Bill is still working on it.
  3. Fluorine Etcher - Will remain down until it can be addressed Monday.
  4. EB3 - Cryo regen failed, on second regen so should come up later.
  5. GCA Autostep - Having computer issues.
  6. The ALD/CABE and EB3 have a more than fair chance of coming back up today.

Bill will have those updates along with the status of the Autostep.

The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest.

Best, Tony Bosch // Demis D. John 21:37, 28 March 2025 (UTC)

RIE #5 is up

We found a burnt wire in the system controller. System is ready to use. //Vraj Mehalana 17:51, 26 March 2025 (UTC)

EVG - Scheduled downtime

I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.

Please let me know if this does not work for you or if you prefer one week over the other.

-Lee //Vraj Mehalana 17:50, 26 March 2025 (UTC)

Raith Velion UP

Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. --Dan //Vraj Mehalana 22:27, 1 April 2025 (UTC)

New Gowns: Toolbelts purchases

We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.

Two vendors for cleanroom belts we are using are listed here, you may request others:

// Demis D. John 03:34, 3 January 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

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