Template:Announcements: Difference between revisions
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=====PECVD#2 will remain down overnight===== |
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Unfortunately PECVD2 will remain down overnight. |
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=====Fluorine ICP: DOWN===== |
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The heater is unable to keep up with the setpoint while running. |
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Hello All, |
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The shaft that actuates the isolation valve between the loadlock and the process chamber has broken. I have reached out to Plasmatherm to see if they happen to have a spare but the odds are exceedingly low. We will update you all as we know more, but it will be down through the weekend and into early next week. |
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Don and I replaced the heater controller without luck. |
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Tony |
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I am cooling down the chamber overnight and we will look into the heater coil in the morning. |
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//[[User: |
// [[User:John_d|Demis D. John]] 15:25, 29 March 2025 (UTC) |
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=====Lab Open===== |
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Hello All, |
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RIE #5 will be down Monday March 13th through the end of Wednesday March 15th for maintenance. |
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Following the campus-wide power shutoff, |
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If we complete the job early we will send a follow-up email releasing the system. |
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The fab is open but the following equipment still has lingering issues: |
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# Unaxis ICP-PECVD - Main computer is not coming up |
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# ALD/CAIBE - All chambers down. Bill is still working on it. |
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# Fluorine Etcher - Will remain down until it can be addressed Monday. |
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# EB3 - Cryo regen failed, on second regen so should come up later. |
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# GCA Autostep - Having computer issues. |
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# The ALD/CABE and EB3 have a more than fair chance of coming back up today. |
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Bill will have those updates along with the status of the Autostep. |
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=====Olympus DSX Microscope: Down===== |
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After speaking with Olympus it looks like there is a problem with the polarizer that is interfering with basic system initialization. I'm waiting for the repair quote and will update everyone when we know more. |
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The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest. |
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=====Stepper #3 (ASML DUV) - Maint moved to March 3rd===== |
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We have postponed the Periodic Maintenance (PM) to the week of Monday March 3rd. |
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Please plan your work accordingly. |
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Best, |
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The tool now runs all process temperatures (120-300c). |
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--Bill Millerski |
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UCSB |
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=====RIE #5 is up===== |
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We found a burnt wire in the system controller. System is ready to use. |
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=====EVG - Scheduled downtime===== |
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I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks. |
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Please let me know if this does not work for you or if you prefer one week over the other. |
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-Lee |
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Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. |
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--Dan |
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=====New Gowns: Toolbelts purchases===== |
=====New Gowns: Toolbelts purchases===== |
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Revision as of 22:27, 1 April 2025
Fluorine ICP: DOWN
Hello All,
The shaft that actuates the isolation valve between the loadlock and the process chamber has broken. I have reached out to Plasmatherm to see if they happen to have a spare but the odds are exceedingly low. We will update you all as we know more, but it will be down through the weekend and into early next week.
Tony // Demis D. John 15:25, 29 March 2025 (UTC)
Lab Open
Hello All,
Following the campus-wide power shutoff, The fab is open but the following equipment still has lingering issues:
- Unaxis ICP-PECVD - Main computer is not coming up
- ALD/CAIBE - All chambers down. Bill is still working on it.
- Fluorine Etcher - Will remain down until it can be addressed Monday.
- EB3 - Cryo regen failed, on second regen so should come up later.
- GCA Autostep - Having computer issues.
- The ALD/CABE and EB3 have a more than fair chance of coming back up today.
Bill will have those updates along with the status of the Autostep.
The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest.
Best, Tony Bosch // Demis D. John 21:37, 28 March 2025 (UTC)
RIE #5 is up
We found a burnt wire in the system controller. System is ready to use. //Vraj Mehalana 17:51, 26 March 2025 (UTC)
EVG - Scheduled downtime
I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.
Please let me know if this does not work for you or if you prefer one week over the other.
-Lee //Vraj Mehalana 17:50, 26 March 2025 (UTC)
Raith Velion UP
Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. --Dan //Vraj Mehalana 22:27, 1 April 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)