Template:Announcements: Difference between revisions
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=====EBL Move-In: Tues 9-11a===== |
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Users, |
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=====Fluorine ICP: DOWN===== |
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Thank you for your patience while we moved the new EBL system in. |
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Hello All, |
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The shaft that actuates the isolation valve between the loadlock and the process chamber has broken. I have reached out to Plasmatherm to see if they happen to have a spare but the odds are exceedingly low. We will update you all as we know more, but it will be down through the weekend and into early next week. |
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The lab is fully open for use. |
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Tony |
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Peder Lenvik |
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Sr. Facilities Lead |
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// [[User:John_d|Demis D. John]] 23:47, 10 March 2025 (UTC) |
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=====Lab Open===== |
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Hello All, |
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System will be available at 12:30 today (Fri Mar 7th). No changes to OAF settings but PAF has moved about 10 points positive for focus. We will work on adjusting PAF back to around 0 (on our cal resist) some time next week. |
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//[[User:John_d|Demis D. John]] 20:51, 7 March 2025 (UTC) |
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Following the campus-wide power shutoff, |
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=====Stepper #3 (ASML DUV) - Maint Complete ===== |
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The fab is open but the following equipment still has lingering issues: |
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ASML Maintenance is complete, the system is up. |
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# Unaxis ICP-PECVD - Main computer is not coming up |
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# ALD/CAIBE - All chambers down. Bill is still working on it. |
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# Fluorine Etcher - Will remain down until it can be addressed Monday. |
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# EB3 - Cryo regen failed, on second regen so should come up later. |
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# GCA Autostep - Having computer issues. |
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# The ALD/CABE and EB3 have a more than fair chance of coming back up today. |
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Bill will have those updates along with the status of the Autostep. |
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The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest. |
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Best, |
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Tony Bosch |
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=====RIE #5 is up===== |
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We found a burnt wire in the system controller. System is ready to use. |
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=====EVG - Scheduled downtime===== |
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I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks. |
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Please let me know if this does not work for you or if you prefer one week over the other. |
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//[[User:Mehalana v|Vraj Mehalana]] 17:50, 26 March 2025 (UTC) |
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=====Raith Velion UP===== |
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Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. |
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The line project has completed and tested good. |
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--Dan |
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Tool is up for use. |
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// |
//[[User:Mehalana v|Vraj Mehalana]] 22:27, 1 April 2025 (UTC) |
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=====New Gowns: Toolbelts purchases===== |
=====New Gowns: Toolbelts purchases===== |
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Revision as of 22:27, 1 April 2025
Fluorine ICP: DOWN
Hello All,
The shaft that actuates the isolation valve between the loadlock and the process chamber has broken. I have reached out to Plasmatherm to see if they happen to have a spare but the odds are exceedingly low. We will update you all as we know more, but it will be down through the weekend and into early next week.
Tony // Demis D. John 15:25, 29 March 2025 (UTC)
Lab Open
Hello All,
Following the campus-wide power shutoff, The fab is open but the following equipment still has lingering issues:
- Unaxis ICP-PECVD - Main computer is not coming up
- ALD/CAIBE - All chambers down. Bill is still working on it.
- Fluorine Etcher - Will remain down until it can be addressed Monday.
- EB3 - Cryo regen failed, on second regen so should come up later.
- GCA Autostep - Having computer issues.
- The ALD/CABE and EB3 have a more than fair chance of coming back up today.
Bill will have those updates along with the status of the Autostep.
The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest.
Best, Tony Bosch // Demis D. John 21:37, 28 March 2025 (UTC)
RIE #5 is up
We found a burnt wire in the system controller. System is ready to use. //Vraj Mehalana 17:51, 26 March 2025 (UTC)
EVG - Scheduled downtime
I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.
Please let me know if this does not work for you or if you prefer one week over the other.
-Lee //Vraj Mehalana 17:50, 26 March 2025 (UTC)
Raith Velion UP
Raith service have replaced the interferometer laser, and the system is pumping down overnight. I'll run calibrations and checks tomorrow and expect the Velion to be open for general use on Wednesday morning. --Dan //Vraj Mehalana 22:27, 1 April 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
- Uniform Technology Tool Belt - note the waist size, the 49” belt fits up to ~36-38” waist.
- HiTEC Fannypack
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)