RIE Etching Recipes: Difference between revisions

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=[[RIE 3 (MRC)]] =
=[[RIE 3 (MRC)]] =
=[[RIE 5 (PlasmaTherm)]] =
=[[RIE 5 (PlasmaTherm)]] =

=AlGaAs Etching (RIE 5)==
*[[media:|AlGaAs Etch Recipes]]

==GaN Etching (RIE 5)==
*[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipes]]


=AlGaAs Etching (RIE 5)==
=AlGaAs Etching (RIE 5)==

Revision as of 18:22, 2 October 2013