DUV Flood Expose: Difference between revisions
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*A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation |
*A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation |
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=Spectra Images= |
=Spectra Images= |
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==Aligner with No Filter== |
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[[image:DUV-Spectra-No-Filter.png|thumb|none|600px|Aligner with No Filter]] |
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==Aligner with Filter for i-line Exposure== |
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[[image:DUV-Spectra-With-Filter.png|thumb|none|600px|Aligner with Filter for i-line Exposure]] |
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==DUV Exposure System Spectra== |
==DUV Exposure System Spectra== |
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[[image:DUV-System-Spectra.png|thumb|none|600px|DUV Exposure System Spectra]] |
[[image:DUV-System-Spectra.png|thumb|none|600px|DUV Exposure System Spectra]] |
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Revision as of 18:44, 12 March 2014
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About
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.
Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.
Detailed Specifications
- DUV wavelengths are 200-260 nm; the lamp power is limited to either 1250 or 2100 watts and can operate in either constant intensity or constant power mode
- The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
- Exposure can be performed on a 4" wafer
- Lamps are nominally rated for 400 hours
- A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation
