Template:Recipe: Difference between revisions
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Latest revision as of 21:56, 3 August 2017
The recipe shown here is just a placeholder - please replace this info with your own. This text won't show up in the final page.
Recipe
- Recipe Name
- SiOVert_MadeUp
- Tool
- Panasonic ICP #2
- Description
- This recipe is made up, and deposits glass with lots of holes in it.
- Recipe Parameters
- Ar = 20 sccm
- O2 = 10 sccm
- Pressure = 50 mT
- RF = 200 W
- Temperature = 200°C
- Dep Rate
- 200 nm/min or 12,000 nm/sec
- Notes
- Make sure sample is inside out before loading into tool.
- This recipe usually doesn't work.
- Film will etch in HF
Characterization
