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''UCSB NanoFab Announcements''
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<!------------- Announcements ---------------->
===== RIE#5: wafer stuck in chamber ======
It has been reported that two wafers are stuck in the process chamber. Don will address this issue tomorrow morning.
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// [[User:John d|John d]] 16:59, 4 June 2018 (PDT)


===== Solvent Bench Bay 7 - Bath & Bench up =====
=====Stepper #3 (ASML DUV) - Tool UP=====
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
The Heated bath in bay 7 is up and ready to use. It is at 80 c now and has a new auto refill as well as a manual fill. Mike Day will be inspecting the bath every morning for water level, contaminated water as well as feed back from all you guys. We know there will most likely be a little fine tuning, So please give Mike Day your feed back.
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// [[User:John d|John d]] 17:26, 30 May 2018 (PDT)


Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
===== RIE#5: No SiCl4 =====
We should have a new cylinder of SiCl4 in two weeks. Until then we
are out of SiCl4.
// [[User:John d|John d]] 21:40, 14 May 2018 (PDT)


Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC)
===== FEI SEM repaired =====
Door replaced, system up.
// [[User:John d|John d]] 17:26, 30 May 2018 (PDT)


===== PECVD#2 is Up =====
=====Suss SB6-8E=====
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
The Plasma Therm Cortex software update is complete, and the system is operational. Standard recipes requalified. Particle counts are now much lower and around historical levels. All users need retraining on the new software. Contact Mike Silva for training.
// [[User:Thibeault|Thibeault]] 17:25, 24 May 2018 (PDT)


-Aidan
//[[User:Mehalana v|Vraj Mehalana]] 12:43, 3 September 2024 (PDT)


=====ICP1 Down=====
<!---------- end of announcements ------------>
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
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//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)
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=====Lab Access Changes: Symmetry App=====
The iris scanner has been decommissioned. Please use the card reader which supports:


-Physical card


-Mobile phone via Symmetry App


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//[[User:Mehalana v|Vraj Mehalana]] 16:59, 14 June 2024 (PDT)
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====== HOW TO ADD NEWS ITEMS ======


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====== HOW TO ADD ITEMS ======
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===== NanoFab making LN2 icecream =====
===== NanoFab making LN2 icecream =====
Tomorrow the NanoFab will be serving liquid nitrogen ice cream.
Tomorrow the NanoFab will be serving liquid nitrogen ice cream.
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// [[User:Silva|Silva]] 13:26, 4 February 2023 (PST)
// ~~~~


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************* (end of example) **************
The ~~~~ will be replaced with your username & timestamp after you submit the post.
The [[User:Silva|Silva]] 13:26, 4 February 2023 (PST) will be replaced with your username & timestamp after you submit the post.
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Latest revision as of 13:21, 22 October 2024

Stepper #3 (ASML DUV) - Tool UP

I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.

Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).

Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)

Suss SB6-8E

When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.

-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Lab Access Changes: Symmetry App

The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//Vraj Mehalana 16:59, 14 June 2024 (PDT)

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