Template:Announcements: Difference between revisions

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(updates to RIE5, PECVD1)
(Raith EBL up)
 
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===== New Raith EBL: tool up =====
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It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field).
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We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage.
''UCSB NanoFab Announcements''
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SEE THE BOTTOM OF THIS PAGE FOR INSTRUCTIONS ON ADDING NEWS ITEMS.
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<!------------- Announcements ---------------->


We will be signing off on the tool tomorrow morning at which point the tool will be available for '''general EBL use to our nanofab community'''. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell
===== RIE#5: Software Upgrades =====
// [[User:John_d|Demis D. John]] 16:28, 2 July 2025 (UTC)
[[RIE_5_(PlasmaTherm)|RIE#5]] system has undergone a software upgrade.
All users will need to be retrained to use the new Cortex software.
// [[User:John d|John d]] 14:39, 16 October 2018 (PDT)


===== PECVD#1: Software Upgrade =====
===== SignupMonkey + Wiki: Off-Campus Access=====
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
Software upgrade completed, everyone must be re-certified to use the tool. All old recipe files have been backed up but not reinstated - let us know if you need your old recipe parameters.
// [[User:John d|John d]] 14:39, 16 October 2018 (PDT)


If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
===== CARY500 - Down - Decomissioned =====
CARY 500 Spectrophotometer has failed - Will not be repaired - being decomissioned. New Filmetrics F10-RT-UVX being ordered as a replacement.
// [[User:Thibeault|Thibeault]] 16:40, 26 September 2018 (PDT)


https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
===== RIE#5: SiCl4 Issue =====
We have a flow rate problem on the SiCl4 gas line. You can only flow the SiCl4 for 5 minutes and then you have to wait 5 minutes before you flow it again. So in order to to do a 10 minute Etch you will have to do it in three steps flow 5 mi, wait 5mi, then flow 5min.
// [[User:John d|John d]] 17:22, 15 June 2018 (PDT)


-- Vraj
// [[User:John_d|Demis D. John]] 20:08, 22 April 2025 (UTC)


=====Suss SB6-8E=====
<!---------- end of announcements ------------>
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
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I will send out an update once we have one.
-Aidan
// [[User:John_d|Demis D. John]] 00:35, 8 December 2024 (UTC)

=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

<!--
SEE THE BOTTOM OF THIS PAGE FOR DETAILED INSTRUCTIONS ON ADDING NEWS ITEMS.
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====== HOW TO ADD ITEMS ======

* You can copy/paste the example below for a new news item.



====== HOW TO ADD NEWS ITEMS ======

* Use level 5 heading for each item (5 equal signs surrounding the title) - they will show up as separate RSS items this way. (This looks best on the Wiki homepage)
* Use level 5 heading for each item (5 equal signs surrounding the title) - they will show up as separate RSS items this way. (This looks best on the Wiki homepage)
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* Use double-slash: // at start of new lines - makes display on the Samsung Display look a lot better, since it strips newlines.
* Use double-slash: // at start of new lines - makes display on the Samsung Display look a lot better, since it strips newlines.
* Optional: After saving the page, delete the name after the two dashes "--" and delete the "[[(talk)...]]" link.
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===== NanoFab making LN2 icecream =====
===== NanoFab making LN2 icecream =====
Tomorrow the NanoFab will be serving liquid nitrogen ice cream.
Tomorrow the NanoFab will be serving liquid nitrogen ice cream.
// [[User:Silva|Silva]] 13:26, 4 February 2023 (PST)
// ~~~~


(end of example)
************* (end of example) **************
The ~~~~ will be replaced with your username & timestamp after you submit the post.
The [[User:Silva|Silva]] 13:26, 4 February 2023 (PST) will be replaced with your username & timestamp after you submit the post.
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Latest revision as of 16:28, 2 July 2025

New Raith EBL: tool up

It appears that the combination of higher beam currents than usual (we did after all upgrade our EBL capabilities for the purpose of higher throughput at much higher beam currents) and the particular (extremely sparse) stitch patterns we use to measure stitch accuracy revealed a subtle limitation in the Fine Focus coil used in their systems (the Fine Focus coil adjusts focal point on the substrate as the beam is deflected around the 1mm field). We are working with the tool designers in Eindhoven as well as the service team in the US to “fix” this issue. However, in the meantime, we understand and recognize the problem sufficiently to address it if it comes up in real day-to-day usage.

We will be signing off on the tool tomorrow morning at which point the tool will be available for general EBL use to our nanofab community. I will be working with a few experienced users in the next couple of days and then will be reaching out to a wider audience to get more of you trained. -- Bill Mitchell // Demis D. John 16:28, 2 July 2025 (UTC)

SignupMonkey + Wiki: Off-Campus Access

Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.

If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:

https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn

-- Vraj // Demis D. John 20:08, 22 April 2025 (UTC)

Suss SB6-8E

We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.

I will send out an update once we have one. -Aidan // Demis D. John 00:35, 8 December 2024 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)