Rapid Thermal Processor (SSI Solaris 150): Difference between revisions

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==About==
==About==
The Solaris 150 is a manual loading RTP system for R&D and pre-production. The Solaris 150 can process up to 152.4mm substrates at a temperature range from RT- 1250 degrees. The unique temperature measurement system of the Solaris requires virtually no calibration for different wafer types and backside emmissivity differences.
The Solaris 150 is a manual loading “Rapid Therm Process” (RPT) or “Rapid Thermal Anneal” (RTA) system for R&D and pre-production. The Solaris 150 can process up to 152.4mm substrates at a temperature range from RT- 1200 degrees. The unique temperature measurement system of the Solaris requires virtually no calibration for different wafer types and backside emmissivity differences.


The Solaris uses a unique PID process controller that ensures accurate temperature stability and uniformity. The system can accommodate four interlocked MFCs for gas mixing and forming gas processing. The Solaris is designed for silicon implant annealing and monitoring and compound semiconductor implant activation and ohmic alloying.
The Solaris uses a unique PID process controller that ensures accurate temperature stability and uniformity. The system can accommodate four interlocked MFCs for gas mixing and forming gas processing. The Solaris is designed for silicon implant annealing and monitoring and compound semiconductor implant activation and ohmic alloying.


==Detailed Specificiations==
==Detailed Specificiations==
Wafer handling: Manual loading of wafer into the oven, single wafer processing.


Wafer sizes: 2", 3", 4", 5" and 6" wafers and pieces.
*Wafer handling: Manual loading of wafer into the oven, single wafer processing.
*Wafer sizes: 2", 3", 4", 5" and 6" wafers and pieces.

Ramp up rate: 10-200C per second, user-controllable.
*Ramp up rate: 10-200°C per second, user-controllable.
*Recommended steady state duration: 0-600 seconds per step.

*Ramp down rate: Temperature Dependent, max 150°C per second.
Recommended steady state duration: 0-600 seconds per step.
*Steady state temperature range: 300C - 1200°C

*Thermocouple temperature accuracy: + 2.5C
Ramp down rate: Temperature Dependent, max 150°C per second.
*Temperature repeatability: + 3C or better at 1150C wafer-to-wafer.

*Temperature uniformity: + 5C across a 6" (150 mm) wafer at 1150C.
Recommended steady state temperature range: 300C - 1250°C
*Gasses available: Nitrogen, Oxygen, Argon, Forming gas (90% Nitrogen / 10% Hydrogen).

Thermocouple temperature accuracy: + 2.5C

Temperature repeatability: + 3C or better at 1150C wafer-to-wafer.

Temperature uniformity: + 5C across a 6" (150 mm) wafer at 1150C.

The tool uses the following gasses: Nitrogen, Oxygen, Argon, Forming gas (90% Nitrogen / 10% Hydrogen).


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==Operating Instructions==
==Operating Instructions==


*[[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]]
*[https://wiki.nanofab.ucsb.edu/w/images/7/7a/RTA_SSI_Operating_Instructions.pdf Solaris 150 Operating Procedure]
*[https://wiki.nanotech.ucsb.edu/wiki/images/6/66/Solaris_150_install_manual_software3_0_revQ.pdf User manual]
*[https://wiki.nanotech.ucsb.edu/wiki/images/6/66/Solaris_150_install_manual_software3_0_revQ.pdf User manual]

Latest revision as of 15:36, 8 December 2023

Rapid Thermal Processor (SSI Solaris 150)
RTP-Solaris-150.jpg
Tool Type Thermal Processing
Location Bay 5
Supervisor Bill Millerski
Supervisor Phone (805) 893-2655
Supervisor E-Mail wmillerski@ucsb.edu
Description Rapid Thermal Annealing (RTA)
Manufacturer SSI
Model Solaris 150
Thermal Processing Recipes
Sign up for this tool



About

The Solaris 150 is a manual loading “Rapid Therm Process” (RPT) or “Rapid Thermal Anneal” (RTA) system for R&D and pre-production. The Solaris 150 can process up to 152.4mm substrates at a temperature range from RT- 1200 degrees. The unique temperature measurement system of the Solaris requires virtually no calibration for different wafer types and backside emmissivity differences.

The Solaris uses a unique PID process controller that ensures accurate temperature stability and uniformity. The system can accommodate four interlocked MFCs for gas mixing and forming gas processing. The Solaris is designed for silicon implant annealing and monitoring and compound semiconductor implant activation and ohmic alloying.

Detailed Specificiations

  • Wafer handling: Manual loading of wafer into the oven, single wafer processing.
  • Wafer sizes: 2", 3", 4", 5" and 6" wafers and pieces.
  • Ramp up rate: 10-200°C per second, user-controllable.
  • Recommended steady state duration: 0-600 seconds per step.
  • Ramp down rate: Temperature Dependent, max 150°C per second.
  • Steady state temperature range: 300C - 1200°C
  • Thermocouple temperature accuracy: + 2.5C
  • Temperature repeatability: + 3C or better at 1150C wafer-to-wafer.
  • Temperature uniformity: + 5C across a 6" (150 mm) wafer at 1150C.
  • Gasses available: Nitrogen, Oxygen, Argon, Forming gas (90% Nitrogen / 10% Hydrogen).


Operating Instructions