Bill Millerski

Bill Millerski Position Senior Equipment Engineer Room Number 1109F Phone (805) 839-2655 E-Mail wmillerski@ucsb.edu

About

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Tools

Bill Millerski is the supervisor for the following tools.

Atomic Layer Deposition (Oxford FlexAL) Stepper 1 (GCA 6300) Stepper 2 (AutoStep 200) Ion Beam Deposition (Veeco NEXUS) RIE 5 (PlasmaTherm) Rapid Thermal Processor (AET RX6) Rapid Thermal Processor (SSI Solaris 150) Step Profilometer (KLA Tencor P-7) Chemical-Mechanical Polisher (Logitech)

XeF2 Etch (Xetch) Mechanical Polisher (Allied) Tube Furnace Wafer Bonding (Thermco) E-Beam 1 (Sharon) Resistivity Mapper (CDE RESMAP) Optical Film Thickness (Nanometric) Vapor HF Etch Wafer Bonder (Logitech WBS7)