Template:Announcements: Difference between revisions
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'''''Important Announcements''''' |
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=====Stepper #3 (ASML DUV) - Tool UP===== |
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I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC. |
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<!------------- Equipment Status ----------------> |
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Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair). |
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===== JEOL EBL Seminar: Wed Nov 2, 11:30am ===== |
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JEOL USA will be presenting results, specifications, and details about their latest electron beam lithography models – focusing on the 8100FS, the upgrade model for our 6300FS tool currently installed here at UCSB. |
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Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // [[User:John_d|Demis D. John]] 00:39, 22 October 2024 (UTC) |
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The presentation will be held in ESB, Room 2001 (upstairs) starting at 11:30am sharp. |
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=====Suss SB6-8E===== |
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// [[User:John d|John d]] 08:46, 29 October 2022 (PDT) |
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When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed. |
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-Aidan |
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===== ASML Maintenance: Nov 1st-4th ===== |
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ASML Engineers will be on site for the periodic maintenance from November 1 through November 4. |
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System will be down during this time. |
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// [[User:John d|John d]] 08:47, 29 October 2022 (PDT) |
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=====ICP1 Down===== |
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The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. |
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Hardware board not starting up, repair in progress. |
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// |
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST) |
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=====Lab Access Changes: Symmetry App===== |
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The iris scanner has been decommissioned. Please use the card reader which supports: |
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Bath damaged, system is down for repair. |
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// [[User:John d|John d]] 08:48, 27 October 2022 (PDT) |
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-Physical card |
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===== E-Beam#2: Heater Down ===== |
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EB2 Heated Processing is down |
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-Mobile phone via Symmetry App |
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===== MLA 150 Software Revision ===== |
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The MLA has new software - make sure to see the updated operating procedures. |
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In addition, any users running the “small” substrate templates (<12mm samples) must be absolutely sure that “Pneumatic Autofocus” is disabled or risk crashing the optics - please see email and note at the tool for details. |
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===== ASML Up; Network status ===== |
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Nanofiles sync & JobCreator functionality is in the process of being restored. |
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Batch_Report syncing is not yet working. JobCreator is working with staff intervention, as local scripts are still being written + tested. |
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// [[User:John d|John d]] 15:44, 29 September 2022 (PDT) |
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===== NanoFab Job Openings ===== |
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The NanoFab has current job openings, apply at: [https://wiki.nanotech.ucsb.edu/wiki/Nanofab_Job_Postings '''NanoFab Job Postings'''] |
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===== NanoFab making LN2 icecream ===== |
===== NanoFab making LN2 icecream ===== |
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Tomorrow the NanoFab will be serving liquid nitrogen ice cream. |
Tomorrow the NanoFab will be serving liquid nitrogen ice cream. |
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Latest revision as of 13:21, 22 October 2024
Stepper #3 (ASML DUV) - Tool UP
I have recalibrated the system focus, system is ready for use, back to your *normal* focus offsets. No need to run and add IQC.
Please do let me know if you see IQC focus is out of the ±50nm spec again - it was intermittent for a while. I believe particulate contamination was the cause (from the last system repair).
Reminder to be *extremely* careful to clean the underside of your wafers and ensure not particles are on the Chrome side of your photomask! Let me know if you see any problems with users following these cleaning procedures, or if you have questions/need a refresher on this. // Demis D. John 00:39, 22 October 2024 (UTC)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)