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=====FEI SEM#2 Replacement Project=====
=====Oxford Flexal ALD=====
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.
The FEI SEM will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st.

//[[User:Mehalana v|Vraj Mehalana]] 10:55, 16 March 2023 (PDT)
Sorry for any inconvenience this may cause.
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Thanks
Bill Millerski
//[[User:Mehalana v|Vraj Mehalana]] 21:12, 12 August 2025 (UTC)

=====Suss SB6-8E=====
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information.
// [[User:John_d|Demis D. John]] 04:28, 5 August 2025 (UTC)

=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

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<!------------- Equipment Status ---------------->
===== E-Beam #5: Down =====
Chuck rotation motor damaged.
// [[User:Mehalana v|Vraj Mehalana]] 14:38, 13 March 2023 (PDT)

===== Unaxis Etch: Down =====
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony
// [[User:John d|John d]] 09:35, 13 February 2023 (PST)

===== Dektak XT ready for training =====
We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please [[Aidan_Hopkins|contact the tool supervisor]].
// [[User:John d|John d]] 10:08, 7 February 2023 (PST)

===== Au Plating: UP=====
only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues.
// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT)

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Latest revision as of 22:24, 13 August 2025

Oxford Flexal ALD

The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.

Sorry for any inconvenience this may cause.

Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)

Suss SB6-8E

This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)