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=====FEI SEM#1 Replacement Project=====
=====Oxford Flexal ALD=====
The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.
The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st.

//[[User:Mehalana v|Vraj Mehalana]] 10:55, 16 March 2023 (PDT)
Sorry for any inconvenience this may cause.
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Thanks
Bill Millerski
//[[User:Mehalana v|Vraj Mehalana]] 21:12, 12 August 2025 (UTC)

=====Suss SB6-8E=====
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact [[Demis D. John]] for more information.
// [[User:John_d|Demis D. John]] 04:28, 5 August 2025 (UTC)

=====ICP1 Down=====
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//[[User:Mehalana v|Vraj Mehalana]] 14:17, 1 March 2024 (PST)

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<!------------- Equipment Status ---------------->

===== Unaxis Etch: Down =====
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony
// [[User:John d|John d]] 09:35, 13 February 2023 (PST)

===== Dektak XT ready for training =====
We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please [[Aidan_Hopkins|contact the tool supervisor]].
// [[User:John d|John d]] 10:08, 7 February 2023 (PST)

===== Au Plating: UP=====
only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues.
// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT)

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Latest revision as of 22:24, 13 August 2025

Oxford Flexal ALD

The PM is proceeding slower than expected. As such, I currently anticipate that the tool will be available for use by the end of the day on Friday.

Sorry for any inconvenience this may cause.

Thanks Bill Millerski //Vraj Mehalana 21:12, 12 August 2025 (UTC)

Suss SB6-8E

This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information. // Demis D. John 04:28, 5 August 2025 (UTC)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)